Abstract: An etching method includes: (a) providing a substrate having an etching target film and a mask on the etching target film to a substrate support in a plasma processing apparatus including a chamber, the substrate support, a plasma generator supplied with source power, and a bias electrode supplied with bias power; and (b) forming a recess by etching the etching target film. In (b), the source power and the bias power are periodically supplied in a cycle that includes a first period and a second period. In the first period, the etching target film is etched, and in the second period, the second processing gas is adsorbed onto the etching target film.

Abstract: Provided is an air conditioner including an indoor unit provided with a microphone element for receiving voice instructions, such that a voice instruction spoken by an operator is acquired with high quality and control based on the voice instruction spoken by the operator is likely to be ensured. The air conditioner includes an indoor unit, a transmission unit, and a reception unit. The indoor unit has a main body and a microphone element. The main body has formed therein a blow-out port through which air-conditioned air is blown out toward a space to be air-conditioned. The microphone element accepts a voice instruction captured from a voice capturing portion arranged at a position that deviates from a ventilation space through which the air blown out from the blow-out port flows, in such a manner as to face the space to be air-conditioned. The transmission unit transmits the voice instruction accepted by the microphone element to an outside as a signal.

Abstract: In one exemplary embodiment, there is provided an etching method. The method includes (a) preparing a substrate, the substrate comprising a silicon-containing film and a mask, the silicon-containing film including a recess, the mask being provided on the silicon-containing film and including an opening that exposes the recess; (b) forming a carbon-containing film on a side wall of the silicon-containing film, the side wall defining the recess; and (c) by using a plasma generated from a processing gas, forming a protective film containing tungsten on the carbon-containing film and etching the silicon-containing film in the recess, the processing gas including a fluorine-containing gas and a tungsten-containing gas.

Abstract: A management system includes a plurality of resources configured to be electrically connected to an external power supply, and a management device configured to manage the resources. The management device includes a planning unit and a management unit. The planning unit is configured to determine a power balancing plan of each of the resources by using first information on a use schedule of each of the resources and second information indicating a magnitude of an environmental load in a process of generating electric power to be supplied by the external power supply. The management unit is configured to manage the resources to cause each of the resources to operate according to the power balancing plan or a modified power balancing plan in power balancing of the external power supply.

Abstract: A setting facilitation apparatus (1400) includes a keyword input reception section (1410), a control command selection section (1420), and a specific control registration section (1430) and is used to facilitate setting of specific control in a control system (1001) that controls a control device through sound inputs. The keyword input reception section (1410) receives an input of information corresponding to a keyword. The control command selection section (1420) displays a certain control command to the control device (1010, 1020) on an edit screen (G) and receives selection of the control command. The specific control registration section (1430) registers a keyword (K) input by the keyword input reception section (1410) and the control command selected by the control command selection section (1420) to a specific control (DB 1104T) while associating the keyword and the control command with each other.

Abstract: An air conditioning system suppresses energy consumption by efficient shared use of air in a common space that is not subjected to air conditioning in an indoor area, among a plurality of air conditioners for the purpose of heat exchange. A plurality of air conditioners each include: a usage-side heat exchanger configured to carry out heat exchange with air in an air-conditioning target space; a heat source-side heat exchanger configured to carry out heat transfer to and from the usage-side heat exchanger; and a heat source-side fan configured to feed air from a common space to the heat source-side heat exchanger and to blow the air into the common space. The heat source-side heat exchangers of the air conditioners are disposed in the common space. A first ventilation fan whose airflow volume is changeable is disposed near an exhaust port through which air is discharged from the common space toward an outdoor area.

Abstract: In an air conditioning system which conditions air in one air-conditioning-target space with a plurality of air conditioners each including a compressor, the energy consumption efficiency as a whole is improved. The air conditioners (21 to 29) each include a service-side heat exchanger exchanging heat between air of a room which is the air-conditioning-target space and a refrigerant, a heat-source-side heat exchanger exchanging heat between air of a common space and the refrigerant, and a compressor (41 to 49) compressing the refrigerant circulating through the service-side heat exchanger and the heat-source-side heat exchanger. When an air conditioning capacity falls within a predetermined range for at least two of the plurality of air conditioners (21 to 29), part of the air conditioners whose compressors are in operation has its compressor stopped.

Abstract: Provided is an air conditioner including an indoor unit provided with a microphone element for receiving voice instructions, such that a voice instruction spoken by an operator is acquired with high quality and control based on the voice instruction spoken by the operator is likely to be ensured. The air conditioner includes an indoor unit (12), a transmission unit, and a reception unit. The indoor unit has a main body (100) and a microphone element. The main body has formed therein a blow-out port (120) through which air-conditioned air is blown out toward a space to be air-conditioned. The microphone element accepts a voice instruction captured from a voice capturing portion (P1) arranged at a position that deviates from a ventilation space through which the air blown out from the blow-out port flows, in such a manner as to face the space to be air-conditioned. The transmission unit transmits the voice instruction accepted by the microphone element to an outside as a signal.

Abstract: A setting facilitation apparatus (1400) includes a keyword input reception section (1410), a control command selection section (1420), and a specific control registration section (1430) and is used to facilitate setting of specific control in a control system (1001) that controls a control device through sound inputs. The keyword input reception section (1410) receives an input of information corresponding to a keyword. The control command selection section (1420) displays a certain control command to the control device (1010, 1020) on an edit screen (G) and receives selection of the control command. The specific control registration section (1430) registers a keyword (K) input by the keyword input reception section (1410) and the control command selected by the control command selection section (1420) to a specific control (DB 1104T) while associating the keyword and the control command with each other.

Abstract: An air conditioning system suppresses energy consumption by efficient shared use of air in a common space that is not subjected to air conditioning in an indoor area, among a plurality of air conditioners for the purpose of heat exchange. A plurality of air conditioners each include: a usage-side heat exchanger configured to carry out heat exchange with air in an air-conditioning target space; a heat source-side heat exchanger configured to carry out heat transfer to and from the usage-side heat exchanger; and a heat source-side fan configured to feed air from a common space to the heat source-side heat exchanger and to blow the air into the common space. The heat source-side heat exchangers of the air conditioners are disposed in the common space. A first ventilation fan whose airflow volume is changeable is disposed near an exhaust port through which air is discharged from the common space toward an outdoor area.

Abstract: An air conditioning system reduces energy consumption by efficient shared use of air in a common space that is not subjected to air conditioning in an indoor area, among a plurality of air conditioners for the purpose of heat exchange. A plurality of air conditioners each include: an air-conditioning target space-side heat exchanger configured to carry out heat exchange with air in an air-conditioning target space; a common space-side heat exchanger configured to carry out heat transfer to and from the air-conditioning target space-side heat exchanger; and a common space-side fan configured to feed taken in air from the common space to the common space-side heat exchanger and to blow the air into the common space. The common space-side heat exchangers of the air conditioners are disposed in the common space. The air conditioners are controlled based on temperature information items at plural positions in the common space.

Abstract: In an air conditioning system which conditions air in one air-conditioning-target space with a plurality of air conditioners each including a compressor, the energy consumption efficiency as a whole is improved. The air conditioners (21 to 29) each include a service-side heat exchanger exchanging heat between air of a room which is the air-conditioning-target space and a refrigerant, a heat-source-side heat exchanger exchanging heat between air of a common space and the refrigerant, and a compressor (41 to 49) compressing the refrigerant circulating through the service-side heat exchanger and the heat-source-side heat exchanger. When an air conditioning capacity falls within a predetermined range for at least two of the plurality of air conditioners (21 to 29), part of the air conditioners whose compressors are in operation has its compressor stopped.

Abstract: In the air conditioner, determination is made whether or not a “3-Dimensional Swing” or a “Left/Right Swing” relating to movement of a left/right flap is set (step S2). When it is determined that the “3-Dimensional Swing” or “Left/Right Swing” is set (step S2: Yes), a determination is made whether or not the swing range of the left/right flap is set to a part of the movable range (step S3). When it is determined in step S3 that the swing range of the left/right flap is set (step S3: Yes), the left/right flap is once returned to the reference position (step S4), and then reciprocation of the left/right flap within the swing range is started (step S5).

Abstract: A biogenic substance concentration measuring apparatus includes an optical measuring apparatus for measuring optical properties of a first substrate and a second substrate by using a cell for biogenic substance concentration measurement that includes: the first substrate on which a plurality of first metallic nanorods, each of which is modified with a substance that bonds specifically to a test substance, are immobilized such that the long axes thereof are aligned in the same direction; and the second substrate on which a plurality of second metallic nanorods, each of which is modified with a blocking substance, are immobilized such that the long axes thereof are aligned perpendicularly to the long axes of the first metallic nanorods on the first substrate, and calculates a biogenic substance concentration with high accuracy from the optical properties.

Abstract: A reference mirror 21 is disposed on a table 2, a first laser displacement sensor L1 for measuring a machined surface of a workpiece W and a second laser displacement sensor L2 for measuring a reference surface of the reference mirror 21 are disposed to a tool holder 3. A measurement motion applying section 24 causes the table 2 and the tool holder 3 to relatively move in a sinusoidal trajectory, and a sensitivity calculating section 28 calculates sensitivity of the first laser displacement sensor L1 based on machined-surface displacement data and reference-surface displacement data which are measured during the relative movement. Subsequently, an actual shape data calculating section 29 corrects the machined-surface displacement data based on the calculated sensitivity, and calculates actual shape data of the machined surface by taking the difference between the corrected machined-surface displacement data and the reference-surface displacement data.

Abstract: A biogenic substance concentration measuring apparatus includes an optical measuring apparatus for measuring optical properties of a first substrate and a second substrate by using a cell for biogenic substance concentration measurement that includes: the first substrate on which a plurality of first metallic nanorods, each of which is modified with a substance that bonds specifically to a test substance, are immobilized such that the long axes thereof are aligned in the same direction; and the second substrate on which a plurality of second metallic nanorods, each of which is modified with a blocking substance, are immobilized such that the long axes thereof are aligned perpendicularly to the long axes of the first metallic nanorods on the first substrate, and calculates a biogenic substance concentration with high accuracy from the optical properties.

Abstract: An air conditioner has an automatic operation mode or other regular mode, and a rest operation mode. The air conditioner includes an indoor unit, an outdoor air-conditioning unit, an air supply/humidification unit, and a humidity control unit. The indoor unit, the outdoor air-conditioning unit, and the air supply/humidification unit humidify or dehumidify air and supply the air into a room. The humidity control unit controls the devices in the indoor unit, the outdoor air-conditioning unit, and the air supply/humidification unit during the regular mode so that the indoor humidity reaches a first target humidity. The humidity control unit also controls the devices in the indoor unit, the outdoor air-conditioning unit, and the air supply/humidification unit during the rest operation mode so that the indoor humidity reaches a second target humidity, which is lower than the first target humidity.

Abstract: In the air conditioner, determination is made whether or not a “3-Dimensional Swing” or a “Left/Right Swing” relating to movement of a left/right flap is set (step S2). When it is determined that the “3-Dimensional Swing” or “Left/Right Swing” is set (step S2: Yes), a determination is made whether or not the swing range of the left/right flap is set to a part of the movable range (step S3). When it is determined in step S3 that the swing range of the left/right flap is set (step S3: Yes), the left/right flap is once returned to the reference position (step S4), and then reciprocation of the left/right flap within the swing range is started (step S5).

Abstract: The present invention provides an apparatus for biogenic substance concentration measurement including: a cell including therein a first region, a second region, and a test solution retention space; a light source; a polarizing plate; and a photoreceiver, in which a plurality of first metallic nanorods each having a first antibody on a surface thereof are immobilized on the first region, a plurality of second metallic nanorods each having a second antibody on a surface thereof are immobilized on the second region, the respective long axes of the plurality of first metallic nanorods are aligned in the same direction, the respective long axes of the plurality of second metallic nanorods are aligned in the same direction, the long-axis direction of the first metallic nanorod is orthogonal to the long-axis direction of the second metallic nanorod, and at least one of the polarizing plate and the cell is capable of rotation with an optical axis as the rotation axis.

Abstract: A reference mirror 21 is disposed on a table 2, a first laser displacement sensor L1 for measuring a machined surface of a workpiece W and a second laser displacement sensor L2 for measuring a reference surface of the reference mirror 21 are disposed to a tool holder 3. A measurement motion applying section 24 causes the table 2 and the tool holder 3 to relatively move in a sinusoidal trajectory, and a sensitivity calculating section 28 calculates sensitivity of the first laser displacement sensor L1 based on machined-surface displacement data and reference-surface displacement data which are measured during the relative movement. Subsequently, an actual shape data calculating section 29 corrects the machined-surface displacement data based on the calculated sensitivity, and calculates actual shape data of the machined surface by taking the difference between the corrected machined-surface displacement data and the reference-surface displacement data.