Abstract: Providing a test head capable of suppressing a probe card from bending. The test head 40 comprises: a test head main body 51 having a frame 51; an interface apparatus 60 electrically connecting a probe card 20 and the test head main body 50 with each other; and a brake unit 80 positioned between the probe card 20 and the frame 51 to transmit a pressing force F applied to the probe card 20 to the frame 51.

Abstract: [Object] Providing a test head capable of suppressing a probe card from bending. [Means for Solving] The test head 40 comprises: a test head main body 51 having a frame 51; an interface apparatus 60 electrically connecting a probe card 20 and the test head main body 50 with each other; and a brake unit 80 positioned between the probe card 20 and the frame 51 to transmit a pressing force F applied to the probe card 20 to the frame 51.

Abstract: An apparatus comprises: an engagement shaft able to engage with a bottom surface of a DSA and held linear movably; an air cylinder supplying a drive force for linearly moving the engagement shaft; and a link mechanism interposed between the air cylinder and the engagement shaft and transmitting the drive force input from the actuator to the engagement shaft, and the link mechanism transmits the drive force input from the air cylinder by rotary motion.

Abstract: An apparatus comprises: an engagement shaft able to engage with a bottom surface of a DSA and held linear-movably; an air cylinder supplying a drive force for linearly moving the engagement shaft; and a link mechanism interposed between the air cylinder and the engagement shaft and transmitting the drive force input from the actuator to the engagement shaft, and the link mechanism transmits the drive force input from the air cylinder by rotary motion.

Abstract: A burn-in apparatus for conducting a burn-in test by housing a burn-in board mounted with a large number of DUT in a burn-in chamber, moving a temperature adjustment board downward and bringing temperature adjustment arrays attached to the temperature adjustment board contact with corresponding DUT; comprising a push-pull device having a movable body moving back and forth in the horizontal direction of a board surface of the burn-in board and a cam mechanism composed of a tilted cam and cam follower for elevating/lowering an elevator board by converting a back-and-forth movement of the movable body to a vertical movement is provided; wherein the push-pull device for elevating/lowering the temperature adjustment board can be downsized, so that a more compact burn-in apparatus can be provided.

Abstract: A burn-in apparatus for conducting a burn-in test by housing a burn-in board mounted with a large number of DUT in a burn-in chamber, moving a temperature adjustment board downward and bringing temperature adjustment arrays attached to the temperature adjustment board contact with corresponding DUT; comprising a push-pull device having a movable body moving back and forth in the horizontal direction of a board surface of the burn-in board and a cam mechanism composed of a tilted cam and cam follower for elevating/lowering an elevator board by converting a back-and-forth movement of the movable body to a vertical movement is provided; wherein the push-pull device for elevating/lowering the temperature adjustment board can be downsized, so that a more compact burn-in apparatus can be provided.