Abstract: A projection optical system for use in a precise copy which uses a pair of catadioptric optical systems consisting of convex mirrors, concave mirrors, and phase correction members is shown. Two catadioptric optical systems commonly use an entrance pupil on a coaxis and are coupled so as to respectively face the phase correction members. Each of the concave mirrors has an opening at the center. Each of the convex mirrors has no opening in one embodiment but has an opening portion at the center in another embodiment.

Abstract: A solid-state imaging device comprising a semiconductor circuit substrate having regions for storage and transfer of signal charges, an insulating film formed on the substrate and a photoconductive film. A light shielding member is provided in the insulating film on the semiconductor circuit substrate. An opening is formed in the insulating film in registry with the charge storage region and an electroconductive film is embedded in the opening. With this construction of the device, blooming is suppressed and the characteristics of the photoconductive film are improved.