Patents by Inventor Atushi Yamashita

Atushi Yamashita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate drying processing apparatus, method, and program recording medium
    Patent number: 7581335
    Abstract: The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier gas and a supply of a dry vapor into a processing tank holding workpieces. A drying process carries out a carrier gas supply step of supplying the carrier gas and a mixed fluid supply step of supplying a mixed fluid prepared by mixing the carrier gas and the dry vapor alternately. A total mixed fluid supply time for which the mixed fluid supply step is executed is not shorter than 57% of a total processing time for which the carrier gas supply step and the mixed fluid supply step are executed.
    Type: Grant
    Filed: November 8, 2006
    Date of Patent: September 1, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Hiroshi Tanaka, Hidetoshi Nakao, Naoki Shindo, Atushi Yamashita, Tsukasa Hirayama, Kotaro Tsurusaki
  • Drying apparatus, drying method, substrate processing apparatus, substrate processing method, and program recording medium
    Publication number: 20070113423
    Abstract: The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier gas and a supply of a dry vapor into a processing tank holding workpieces. A drying process carries out a carrier gas supply step of supplying the carrier gas and a mixed fluid supply step of supplying a mixed fluid prepared by mixing the carrier gas and the dry vapor alternately. A total mixed fluid supply time for which the mixed fluid supply step is executed is not shorter than 57% of a total processing time for which the carrier gas supply step and the mixed fluid supply step are executed.
    Type: Application
    Filed: November 8, 2006
    Publication date: May 24, 2007
    Inventors: Hiroshi Tanaka, Hidetoshi Nakao, Naoki Shindo, Atushi Yamashita, Tsukasa Hirayama, Kotaro Tsurusaki