Patents by Inventor Avi Vaknin

Avi Vaknin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enhancing performance of overlay metrology
    Patent number: 12001148
    Abstract: A method includes generating a sequence of images of a semiconductor wafer from first and second detectors. The first detector images the wafer with first imaging parameters and the second detector images the wafer with second imaging parameters. The first or second imaging parameters are varied across the sequence of images to provide variation at sites across the wafer. The method includes providing a metric indicative of center-of-symmetry variations of first and second target features as a function of the varied imaging parameters based on the sequence of images. The method includes identifying a landscape of values of the varied image parameters for which the metric are below a predefined limit. The method includes generating a recipe for metrology measurements in which the varied imaging parameters are set to values within the landscape. The method includes generating metrology measurements from a production wafer based on the recipe.
    Type: Grant
    Filed: February 27, 2023
    Date of Patent: June 4, 2024
    Assignee: KLA Corporation
    Inventors: Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri, Vladimir Levinski, Yuri Paskover, Anna Golotsvan, Nachshon Rothman, Nireekshan K. Reddy, Nir BenDavid, Avi Abramov, Dror Yaacov, Yoram Uziel, Nadav Gutman
  • WLAN capacity enhancement using SDM
    Patent number: 8014366
    Abstract: A method for communication over a wireless local area network (WLAN) includes receiving uplink signals from a plurality of stations in the WLAN. Responsively to the uplink signals, a set of the stations is selected for inclusion in a spatial multiplexing group. Downlink signals are transmitted simultaneously to the stations in the set using spatial division multiplexing (SDM).
    Type: Grant
    Filed: August 13, 2004
    Date of Patent: September 6, 2011
    Assignee: Wavion Ltd.
    Inventors: Mati Wax, Ruby Tweg, Aviv Aviram, Evgeni Levitan, Amit Freiman, Einat Ofir-Arad, Hovav Elzas, Alex Podyetsky, Avi Vaknin, Yael Shavit
  • WLAN capacity enhancement using SDM
    Publication number: 20050047384
    Abstract: A method for communication over a wireless local area network (WLAN) includes receiving uplink signals from a plurality of stations in the WLAN. Responsively to the uplink signals, a set of the stations is selected for inclusion in a spatial multiplexing group. Downlink signals are transmitted simultaneously to the stations in the set using spatial division multiplexing (SDM).
    Type: Application
    Filed: August 13, 2004
    Publication date: March 3, 2005
    Applicant: Wavion Ltd.
    Inventors: Mati Wax, Ruby Tweg, Aviv Aviram, Evgeni Levitan, Amit Freiman, Einat Ofir-Arad, Hovav Elzas, Alex Podyetsky, Avi Vaknin, Yael Shavit