Abstract: Accuracy of detection of a fly out of a substrate from a polishing head is improved. A substrate processing apparatus includes a polishing table 350 to which a polishing pad 352 for polishing the substrate is attachable, a polishing head 302 for holding and pressing the substrate against the polishing pad 352, a retainer member disposed surrounding the polishing head 302, a retainer member pressurization chamber disposed adjacent to the retainer member, an arm 360 for holding and turning the polishing head 302, and a slip out detector 910 for detecting a fly out of the substrate from the polishing head 302 based on a turning torque of the arm 360 or based on a flow rate of a fluid supplied to the retainer member pressurization chamber.

Abstract: To achieve a cleaning module and a substrate processing apparatus that can improve the cleaning capability for a substrate with a simple structure. A cleaning module includes a first transfer mechanism 210-1, an ultrasonic cleaning tank 440, a transfer machine 420, and a second transfer mechanism 210-2. The first transfer mechanism 210-1 is for transferring a substrate WF with a surface to be polished facing downward up to a substrate grip or release position 418 on a downstream side along a transfer passage 405. The ultrasonic cleaning tank 440 is disposed at a position spaced apart from the transfer passage 405 and is for cleaning a substrate WF with the surface to be polished facing downward. The transfer machine 420 is for transferring the substrate WF between the substrate grip or release position 418 of the transfer passage 405 and the ultrasonic cleaning tank 440.

Abstract: Accuracy of detection of a fly out of a substrate from a polishing head is improved. A substrate processing apparatus includes a polishing table 350 to which a polishing pad 352 for polishing the substrate is attachable, a polishing head 302 for holding and pressing the substrate against the polishing pad 352, a retainer member disposed surrounding the polishing head 302, a retainer member pressurization chamber disposed adjacent to the retainer member, an arm 360 for holding and turning the polishing head 302, and a slip out detector 910 for detecting a fly out of the substrate from the polishing head 302 based on a turning torque of the arm 360 or based on a flow rate of a fluid supplied to the retainer member pressurization chamber.

Abstract: On each of a plurality of disposed racks, an injection drug storing container is each detachably mounted. The injection drug storing container includes a transportation device for transporting a stored injection drug in one direction. The injection drug transported by the transportation device is housed in each housing portion formed on a circumferential portion of a rotating body one by one. The injection drug in each housing portion is sequentially delivered one by one by rotation of the rotating body.

Abstract: On each of a plurality of disposed racks, an injection drug storing container is each detachably mounted. The injection drug storing container includes a transportation means for transporting a stored injection drug in one direction. The injection drug transported by the transportation means is housed in each housing portion formed on a circumferential portion of a rotating body one by one. The injection drug in each housing portion is sequentially delivered one by one by rotation of the rotating body.

Abstract: A medicine feeder apparatus comprising a plurality of cassettes each of which contains a different kind of medicine and a base portion on which the plurality of cassettes are mounted and which discharges the medicine in accordance with the prescription. the apparatus comprises an identification which is provided on each cassette, the identification showing information on the medicine contained in the cassette; a reader which is provided on the base portion, the reader reading the identification of the cassette during the cassette is mounted on the base portion; and a rock which is provided on the base portion, the rock preventing the cassette from being mounted. If the information of the medicine read from the identification by the reader does not coincide with a previously stored information, the rock is operated, while if coincide, the rock is released.

Abstract: A medicine feeder apparatus comprising a plurality of cassettes each of which contains a different kind of medicine and a base portion on which the plurality of cassettes are mounted and which discharges the medicine in accordance with the prescription. the apparatus comprises an identification which is provided on each cassette, the identification showing information on the medicine contained in the cassette; a reader which is provided on the base portion, the reader reading the identification of the cassette during the cassette is mounted on the base portion; and a rock which is provided on the base portion, the rock preventing the cassette from being mounted. If the information of the medicine read from the identification by the reader does not coincide with a previously stored information, the rock is operated, while if coincide, the rock is released.