Patents by Inventor Barbara F. Westlund

Barbara F. Westlund has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dry etch process for forming champagne profiles, and dry etch apparatus
    Patent number: 5013400
    Abstract: A two-step process for forming champagne profiles on semiconductor wafers that provide, when metallized, good reliability, microcracking-free contacts and vias is disclosed. Dry etch apparatus having electrodes in a triode configuration, two plasma forming regions, and a pressure control system operative to provide a wide setpoint pressure range is also disclosed.
    Type: Grant
    Filed: January 30, 1990
    Date of Patent: May 7, 1991
    Assignee: General Signal Corporation
    Inventors: Howard S. Kurasaki, Barbara F. Westlund, James E. Nulty, E. John Vowles