Abstract: Various exemplary systems and methods provide for the smooth conveyance of an article and transfer of an article on or off a conveyance path. In one example, a system comprises a first conveyance path having two ends, in which the conveyance path includes a plurality of conveyance rollers arranged to convey the article from the first end to the second end, and at least one of the rollers is configured to rotate at a first rate to drive the article. The system further comprises a transition mechanism disposed proximate to the second end of the first conveyance path. The transition mechanism includes a transition wheel positioned to receive the article from the second end, and the transition wheel is configured to be driven at a second rate that is coordinated with the first rate.

Abstract: A transport system is provided to move an article from a conveyance section to a location. The conveyance section transports the article using a pair of transport belts. A lift lowers the article downward between the pair of transport belts. A hoist translates the article beneath the conveyance section to the location while supporting the article from above. The article may include a FOUP, semiconductor wafer, substrate for the manufacture of display devices or photovoltaics. The hoist may comprise a carriage and a gripper configured to grasp and vertically move the article while suspended beneath the carriage.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A transport system including a curved conveyance section configured for moving articles along a curved conveyance path. At least one turnstile wheel is configured to guide the articles along the curved conveyance path. In some embodiments, the turnstile wheel comprises a first surface configured to guide an exterior vertical belt along a continuous curve on an exterior edge of the curved conveyance path and a second surface configured to guide an interior vertical belt along a continuous curve on an interior edge of the curved conveyance path. The first surface and the second surface are configured to have a common axis of rotation outside the curved conveyance path and to rotate at a same angular velocity. The interior vertical belt and the exterior vertical belt are configured to support the articles as the articles are conveyed along the curved conveyance path. The articles are conveyed along the curved conveyance path without stopping or significantly slowing down.

Abstract: A transport system includes a curved conveyance section configured to move an article along a curved path without significantly slowing or stopping. Exemplary articles for conveyance include semiconductor wafers and substrates for display devices and photovoltaic devices. In some embodiments, the conveyance section includes a turnstile wheel including an interior surface and an exterior surface. The external surface is configured to guide an exterior belt that in turn supports one side of the article around the conveyance path. The internal surface is configured to either support an opposing side of the article, or guide an interior belt that in turn supports the article around the conveyance path. Instead of employing a turnstile wheel, other embodiments employ interior and exterior supports for supporting opposite ends of the article, such as interior and exterior belts, that move at essentially the same angular rate along the inside and outside of the conveyance path.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, vertical, inclined, and declined conveyance sections optionally physically offset from one another horizontally, vertically, or combinations thereof. The articles are conveyed between a pair of transport belts or rollers and/or by conveyance elements such as a gripper, a robotic hoist, a lift, or an elevator while being optionally supported by protrusions extending from the belts or rollers, secured via a kinematic interface, grasped by a gripper, or supported by air bearings. Multiple conveyance sections, lifts, robotic hoists, grippers, and elevators can be joined, interfaced, and/or integrated over complex paths and arrangements with one another as well as with manufacturing, processing, measurement, and sorting equipment. The articles conveyed may include semiconductor wafers, substrates for the manufacture of display devices or photovoltaics, or the like.

Abstract: Systems for transporting an article using horizontal belts are described. Transport sections include a first horizontal belt and a second horizontal belt, and the belts are separated by a distance configured for placement of the article between them. A plurality of horizontal rollers is configured to guide the belts, and a plurality of support protrusions extends from each of the belts. The protrusions are configured to support a weight of the article. Methods for conveying articles using horizontal belts are described. Methods for loading, unloading, and changing the conveyance path of articles are described.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined, and declined conveyance sections optionally physically offset from one another. The articles are conveyed between a pair of horizontal belts, vertical rollers, or vertical belts while being supported by protrusions extending from the horizontal belts, vertical rollers, or vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear, and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Abstract: A clip used to attach a towel to a golf club, (e.g., a putter). The clip has an opening to attach to the golf club, and an opening to attach to the towel. The clip may be mechanically attached to the club, or may use magnets. The towel may be permanently attached to the clip or may be removable. Methods for attaching a towel to a golf club and manufacturing the clip are also provided.

Abstract: A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing.

Abstract: A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing.

Abstract: A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing.

Abstract: A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding envirornment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing.