Patents by Inventor Bart Luc Swinnen

Bart Luc Swinnen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
    Patent number: 7565219
    Abstract: A method according to one embodiment of the invention relates to determining at least one parameter of a model that provides information about a position of an object. The object has a plurality of alignment marks of which desired positions are known. The method includes measuring a plurality of positional parameters for each alignment mark. Based on the measured plurality of positional parameters, which are weighted with weighing coefficients, at least one parameter of the model of the object is determined. The numerical value of each weighing coefficient is determined together with the at least one parameter of the model.
    Type: Grant
    Filed: December 9, 2003
    Date of Patent: July 21, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Maurits Van Der Schaar, Jeroen Huijbregstse, Sicco Ian Schets, Bart Luc Swinnen
  • Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
    Patent number: 7558643
    Abstract: A method according to one embodiment of the invention relates to determining at least one parameter of a model that provides information about a position of an object. The object may include a plurality of alignment marks of which desired positions are known. The method includes measuring a plurality of positional parameters for each alignment mark. Based on the measured plurality of positional parameters, which are weighted with weighing coefficients, at least one parameter of the model of the object is determined. The numerical value of each weighing coefficient is determined together with the at least one parameter of the model.
    Type: Grant
    Filed: December 9, 2004
    Date of Patent: July 7, 2009
    Assignees: ASML Netherlands B.V., IMEC v.z.w.
    Inventors: Maurits Van Der Schaar, Jeroen Huijbregtse, Sicco Ian Schets, Bart Luc Swinnen