Abstract: A method for fabricating a nitrogen-containing dielectric layer and semiconductor device including the dielectric layer in which a silicon oxide layer is formed on a substrate, such that an interface region resides adjacent to substrate and a surface region resides opposite the interface region. Nitrogen is introduced into the silicon oxide layer by applying a nitrogen plasma. After applying nitrogen plasma, the silicon oxide layer is annealed. The processes of introducing nitrogen into the silicon oxide layer and annealing the silicon oxide layer are repeated to create a bi-modal nitrogen concentration profile in the silicon oxide layer. In the silicon oxide layer, the peak nitrogen concentrations are situated away from the interface region and at least one of the peak nitrogen concentrations is situated in proximity to the surface region. A method for fabricating a semiconductor device is incorporating the nitrogen-containing silicon oxide layers also disclosed.

Abstract: A method for fabricating a nitrogen-containing dielectric layer and semiconductor device including the dielectric layer in which a silicon oxide layer is formed on a substrate, such that an interface region resides adjacent to substrate and a surface region resides opposite the interface region. Nitrogen is introduced into the silicon oxide layer by applying a nitrogen plasma. After applying nitrogen plasma, the silicon oxide layer is annealed. The processes of introducing nitrogen into the silicon oxide layer and annealing the silicon oxide layer are repeated to create a bi-modal nitrogen concentration profile in the silicon oxide layer. In the silicon oxide layer, the peak nitrogen concentrations are situated away from the interface region and at least one of the peak nitrogen concentrations is situated in proximity to the surface region. A method for fabricating a semiconductor device is incorporating the nitrogen-containing silicon oxide layers also disclosed.

Abstract: Prototype software is securely delivered and evaluated by electronic transfer over a network. The software is secured by multiple levels of encryption to prevent unauthorized copying, modification, and/or use of the prototype software. Electronic transfer of the prototype software minimizes the time and cost associated with providing prototype software for testing to remote third party testers. Once the software has been transferred electronically to the third party tester, the software developer electronically maintains control of that software by restricting access to an authorized third party, monitoring testing, and deleting any files related to the prototype software from the third party test workstation.

Abstract: A kiosk includes a game machine console having a processing system. The game machine has a connector that, in use, is connected to a cartridge comprising a memory. A video printer has a video input connected to a video output of the game machine console and a video output connected to a video input of a television. Control circuitry is connected to the game machine and to the video printer. The control circuitry is configured to enable a user to selectively print out images stored in the memory of the cartridge.