Patents by Inventor Benedikt Stoib
Benedikt Stoib has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240154020Abstract: A semiconductor device includes a semiconductor body having first and second opposite surfaces along a vertical direction, and an active diode area. The active diode area includes: a p-doped anode region adjoining the first surface; an n-doped drift region between the anode region and the second surface; an n-doped cathode contact region adjoining the second surface; a p-doped injection region adjoining the second surface and the cathode contact region; and a p-doped auxiliary region between the drift region and the cathode contact region. The auxiliary region includes first and second sub-regions. In a top view, the first sub-region covers at least part of the injection region and the second sub-region covers at least part of the cathode contact region. In the top view, the auxiliary region includes a plurality of openings covering from 0.1% to an 20% of a surface area of the active diode area at the second surface.Type: ApplicationFiled: November 2, 2023Publication date: May 9, 2024Inventors: Benedikt Stoib, Hans-Joachim Schulze, Marten Müller, Daniel Schlögl, Moriz Jelinek, Holger Schulze
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Publication number: 20230352531Abstract: A method of manufacturing a vertical power semiconductor device includes forming a drift region in a semiconductor body having a first main surface and a second main surface opposite to the first main surface along a vertical direction, the drift region including platinum atoms, and forming a field stop region in the semiconductor body between the drift region and the second main surface, the field stop region including a plurality of impurity peaks, wherein a first impurity peak of the plurality of impurity peaks is set a larger concentration than a second impurity peak of the plurality of impurity peaks, wherein the first impurity peak includes hydrogen and the second impurity peak includes helium.Type: ApplicationFiled: July 12, 2023Publication date: November 2, 2023Inventors: Hans-Joachim Schulze, Christian Jaeger, Moriz Jelinek, Daniel Schloegl, Benedikt Stoib
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Patent number: 11742384Abstract: A vertical power semiconductor device is proposed. The vertical power semiconductor device includes a semiconductor body having a first main surface and a second main surface opposite to the first main surface along a vertical direction. The vertical power semiconductor device further includes a drift region in the semiconductor body. The drift region includes platinum atoms. The vertical power semiconductor device further includes a field stop region in the semiconductor body between the drift region and the second main surface. The field stop region includes a plurality of impurity peaks. A first impurity peak of the plurality of impurity peaks has a larger concentration than a second impurity peak of the plurality of impurity peaks. The first impurity peak includes hydrogen and the second impurity peak includes helium.Type: GrantFiled: March 30, 2021Date of Patent: August 29, 2023Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Christian Jaeger, Moriz Jelinek, Daniel Schloegl, Benedikt Stoib
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Patent number: 11569392Abstract: A power semiconductor diode includes a semiconductor body having first and second main surfaces opposite to each other along a vertical direction. A drift region of a second conductivity type is arranged between an anode region of a first conductivity type and the second main surface. A field stop region of the second conductivity type is arranged between the drift region and the second main surface. A dopant concentration profile of the field stop region along the vertical direction includes a maximum peak. An injection region of the first conductivity type is arranged between the field stop region and the second main surface, with a pn-junction between the injection and field stop regions. A cathode contact region of the second conductivity type is arranged between the field stop region and the second main surface. A first vertical distance between the pn-junction and the maximum peak ranges from 200 nm to 1500 nm.Type: GrantFiled: September 3, 2021Date of Patent: January 31, 2023Assignee: Infineon Technologies AGInventors: Hans-Joachim Schulze, Christian Jaeger, Moriz Jelinek, Daniel Schloegl, Benedikt Stoib
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Publication number: 20220406600Abstract: A semiconductor device includes: an n-doped drift region between first and second surfaces of a semiconductor body; a p-doped first region at the second surface; and an n-doped field stop region between the drift and first region. The field stop region includes first and second sub-regions with hydrogen related donors. A p-n junction separates the first region and first sub-region. A concentration of the hydrogen related donors, along a first vertical extent of the first sub-region, steadily increases from the pn-junction to a maximum value, and steadily decreases from the maximum value to a reference value at a first transition between the sub-regions. A second vertical extent of the second sub-region ends at a second transition to the drift region where the concentration of hydrogen related donors equals 10% of the reference value. A maximum concentration value in the second sub-region is at most 20% larger than the reference value.Type: ApplicationFiled: June 10, 2022Publication date: December 22, 2022Inventors: Moriz Jelinek, Thomas Waechtler, Bernd Bitnar, Daniel Schloegl, Hans-Joachim Schulze, Oana Julia Spulber, Benedikt Stoib, Christian Krueger
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Publication number: 20220406947Abstract: A semiconductor device includes: a drift region of a first conductivity type arranged between first and second surfaces of a semiconductor body; a first region of the first conductivity type at the second surface; a second region of a second conductivity type adjacent the first region at the second surface; a field stop region of the first conductivity type between the drift region and second surface; and a first electrode on the second surface directly adjacent to the first region in a first part of the second surface and to the second region in a second part of the second surface. The field stop region includes first and second sub-regions. Over a predominant portion of the first part of the second surface, the second sub-region directly adjoins the first region and includes dopants of the second conductivity type that partially compensate dopants of the first conductivity type.Type: ApplicationFiled: June 13, 2022Publication date: December 22, 2022Inventors: Benedikt Stoib, Moriz Jelinek, Marten Mueller, Daniel Schloegl, Hans-Joachim Schulze, Holger Schulze
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Publication number: 20220375811Abstract: A power semiconductor device includes, an active area that conducts load current between first and second load terminal structures, a drift region, and a backside region that includes, inside the active area, first and second backside emitter zones one or both of which includes: first sectors having at least one first region of a second conductivity type contacting the second load terminal structure and a smallest lateral extension of at most 50 ?m; and/or second sectors having a second region of the second conductivity type contacting the second load terminal structure and a smallest lateral extension of at least 50 ?m. The emitter zones differ by at least of: the presence of first and/or second sectors; smallest lateral extension of first and/or second sectors; lateral distance between neighboring first and/or second sectors; smallest lateral extension of the first regions; lateral distance between neighboring first regions within the same first sector.Type: ApplicationFiled: May 11, 2022Publication date: November 24, 2022Inventors: Roman Baburske, Moritz Hauf, Hans-Joachim Schulze, Holger Schulze, Benedikt Stoib
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Patent number: 11437471Abstract: A power semiconductor device includes: a semiconductor body; a first load terminal structure coupled to the body front side and a second load terminal structure coupled to the body backside; an active area for conducting a load current between the load terminal structures; a drift region having a first conductivity type; a backside region arranged at the backside and including, inside the active area, first and second backside emitter zones. At least one of the backside emitter zones includes: first sectors each having at least one first region of a second conductivity type, the first region arranged in contact with the second load terminal structure and having a smallest lateral extension of at most 50 ?m; and/or second sectors each having a second region of the second conductivity type arranged in contact with the second load terminal structure and having a smallest lateral extension of at least 50 ?m.Type: GrantFiled: December 11, 2020Date of Patent: September 6, 2022Assignee: Infineon Technologies AGInventors: Roman Baburske, Moritz Hauf, Hans-Joachim Schulze, Holger Schulze, Benedikt Stoib
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Publication number: 20220085215Abstract: A power semiconductor diode includes a semiconductor body having first and second main surfaces opposite to each other along a vertical direction. A drift region of a second conductivity type is arranged between an anode region of a first conductivity type and the second main surface. A field stop region of the second conductivity type is arranged between the drift region and the second main surface. A dopant concentration profile of the field stop region along the vertical direction includes a maximum peak. An injection region of the first conductivity type is arranged between the field stop region and the second main surface, with a pn-junction between the injection and field stop regions. A cathode contact region of the second conductivity type is arranged between the field stop region and the second main surface. A first vertical distance between the pn-junction and the maximum peak ranges from 200 nm to 1500 nm.Type: ApplicationFiled: September 3, 2021Publication date: March 17, 2022Inventors: Hans-Joachim Schulze, Christian Jaeger, Moriz Jelinek, Daniel Schloegl, Benedikt Stoib
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Publication number: 20210320174Abstract: A vertical power semiconductor device is proposed. The vertical power semiconductor device includes a semiconductor body having a first main surface and a second main surface opposite to the first main surface along a vertical direction. The vertical power semiconductor device further includes a drift region in the semiconductor body. The drift region includes platinum atoms. The vertical power semiconductor device further includes a field stop region in the semiconductor body between the drift region and the second main surface. The field stop region includes a plurality of impurity peaks. A first impurity peak of the plurality of impurity peaks has a larger concentration than a second impurity peak of the plurality of impurity peaks. The first impurity peak includes hydrogen and the second impurity peak includes helium.Type: ApplicationFiled: March 30, 2021Publication date: October 14, 2021Inventors: Hans-Joachim Schulze, Christian Jaeger, Moriz Jelinek, Daniel Schloegl, Benedikt Stoib
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Publication number: 20210193800Abstract: A power semiconductor device includes: a semiconductor body; a first load terminal structure coupled to the body front side and a second load terminal structure coupled to the body backside; an active area for conducting a load current between the load terminal structures; a drift region having a first conductivity type; a backside region arranged at the backside and including, inside the active area, first and second backside emitter zones. At least one of the backside emitter zones includes: first sectors each having at least one first region of a second conductivity type, the first region arranged in contact with the second load terminal structure and having a smallest lateral extension of at most 50 ?m; and/or second sectors each having a second region of the second conductivity type arranged in contact with the second load terminal structure and having a smallest lateral extension of at least 50 ?m.Type: ApplicationFiled: December 11, 2020Publication date: June 24, 2021Inventors: Roman Baburske, Moritz Hauf, Hans-Joachim Schulze, Holger Schulze, Benedikt Stoib
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Patent number: 10892168Abstract: A method for forming a semiconductor device includes incorporating recombination center atoms into a semiconductor substrate. The method further includes, after incorporating the recombination center atoms into the semiconductor substrate, implanting noble gas atoms into a doping region of a diode structure and/or a transistor structure, the doping region being arranged at a surface of the semiconductor substrate.Type: GrantFiled: December 17, 2018Date of Patent: January 12, 2021Assignee: Infineon Technologies AGInventors: Gerhard Schmidt, Mario Barusic, Benedikt Stoib
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Patent number: 10868159Abstract: A power semiconductor device includes a semiconductor body having a front side coupled to a first load terminal structure and a backside coupled to a second load terminal structure. A front side structure arranged at the front side is at least partially included in the semiconductor body and defines a front side active region configured to conduct a load current between the load terminal structures. The front side structure includes first and second lateral edge portions and a first corner portion that forms a transition between the lateral edge portions. A drift region included in the semiconductor body is configured to carry the load current. A backside emitter region arranged in the semiconductor body in contact with the second load terminal has a net dopant concentration higher than a net dopant concentration of the drift region.Type: GrantFiled: May 16, 2019Date of Patent: December 15, 2020Assignee: Infineon Technologies AGInventors: Benedikt Stoib, Hans-Joachim Schulze, Max Christian Seifert
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Publication number: 20190355841Abstract: A power semiconductor device includes a semiconductor body having a front side coupled to a first load terminal structure and a backside coupled to a second load terminal structure. A front side structure arranged at the front side is at least partially included in the semiconductor body and defines a front side active region configured to conduct a load current between the load terminal structures. The front side structure includes first and second lateral edge portions and a first corner portion that forms a transition between the lateral edge portions. A drift region included in the semiconductor body is configured to carry the load current. A backside emitter region arranged in the semiconductor body in contact with the second load terminal has a net dopant concentration higher than a net dopant concentration of the drift region.Type: ApplicationFiled: May 16, 2019Publication date: November 21, 2019Inventors: Benedikt Stoib, Hans-Joachim Schulze, Max Christian Seifert
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Publication number: 20190189463Abstract: A method for forming a semiconductor device includes incorporating recombination center atoms into a semiconductor substrate. The method further includes, after incorporating the recombination center atoms into the semiconductor substrate, implanting noble gas atoms into a doping region of a diode structure and/or a transistor structure, the doping region being arranged at a surface of the semiconductor substrate.Type: ApplicationFiled: December 17, 2018Publication date: June 20, 2019Inventors: Gerhard Schmidt, Mario Barusic, Benedikt Stoib