Patents by Inventor Benjamin Chu

Benjamin Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200335610
    Abstract: Tunneling Field Effect Transistors (TFETs) are promising devices in that they promise significant performance increase and energy consumption decrease due to a steeper subthreshold slope (for example, smaller sub-threshold swing). In various embodiments, vertical fin-based TFETs can be fabricated in trenches, for example, silicon trenches. In another embodiment, vertical TFETs can be used on different material systems acting as a substrate and/or trenches (for example, Si, Ge, III-V semiconductors, GaN, and the like). In one embodiment, the tunneling direction in the channel of the vertical TFET can be perpendicular to the Si substrates. In one embodiment, this can be different than the tunneling direction in the channel of lateral TFETs.
    Type: Application
    Filed: February 28, 2018
    Publication date: October 22, 2020
    Applicant: Intel Corporation
    Inventors: Cheng-Ying Huang, Jack Kavalieros, Ian Young, Matthew Metz, Willy Rachmady, Uygar Avci, Ashish Agrawal, Benjamin Chu-Kung
  • Publication number: 20200328278
    Abstract: Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.
    Type: Application
    Filed: June 26, 2020
    Publication date: October 15, 2020
    Applicant: Intel Corporation
    Inventors: Matthew V. Metz, Willy Rachmady, Harold W. Kennel, Van H. Le, Benjamin Chu-Kung, Jack T. Kavalieros, Gilbert Dewey
  • Publication number: 20200316504
    Abstract: Membranes suitable for use in membrane distillation are provided. Such membranes may include nano-fibrous layers with adjustable pore sizes. The membranes may include a hydrophobic nanofibrous scaffold and a thin hydrophilic protecting layer that can significantly reduce fouling and scaling problems.
    Type: Application
    Filed: June 18, 2020
    Publication date: October 8, 2020
    Inventors: Benjamin Chu, Benjamin S. Hsiao
  • Publication number: 20200313001
    Abstract: Integrated circuit structures having source or drain structures and germanium N-channels are described. In an example, an integrated circuit structure includes a fin having a lower fin portion and an upper fin portion, the upper fin portion including germanium. A gate stack is over the upper fin portion of the fin. A first source or drain structure includes an epitaxial structure embedded in the fin at a first side of the gate stack. A second source or drain structure includes an epitaxial structure embedded in the fin at a second side of the gate stack. Each epitaxial structure includes a first semiconductor layer in contact with the upper fin portion, and a second semiconductor layer on the first semiconductor layer. The first semiconductor layer comprises silicon, germanium and phosphorous, and the second semiconductor layer comprises silicon and phosphorous.
    Type: Application
    Filed: March 28, 2019
    Publication date: October 1, 2020
    Inventors: Ryan KEECH, Benjamin CHU-KUNG, Subrina RAFIQUE, Devin MERRILL, Ashish AGRAWAL, Harold KENNEL, Yang CAO, Dipanjan BASU, Jessica TORRES, Anand MURTHY
  • Publication number: 20200312973
    Abstract: This disclosure illustrates a transistor with dual gate workfunctions. The transistor with dual gate workfunctions may comprise a source region, a drain region, a channel between the source region and the drain region, and a gate to control a conductivity of the channel. The gate may comprise a first portion with a first workfunction and a second portion with a second workfunction. One of the portions is nearer the source region than the other portion. The workfunction of the portion nearer the source provides a lower thermionic barrier than the workfunction of the portion further away from the source.
    Type: Application
    Filed: December 21, 2017
    Publication date: October 1, 2020
    Inventors: Sean T. MA, Abhishek SHARMA, Gilbert DEWEY, Van H. LE, Jack T. KAVALIEROS, Tahir GHANI, Benjamin CHU-KUNG, Shriram SHIVARAMAN
  • Patent number: 10784170
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: September 22, 2020
    Assignee: Intel Corporation
    Inventors: Marko Radosavljevic, Ravi Pillarisetty, Gilbert Dewey, Niloy Mukherjee, Jack Kavalieros, Willy Rachmady, Van Le, Benjamin Chu-Kung, Matthew Metz, Robert Chau
  • Publication number: 20200287006
    Abstract: Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a gate electrode above a substrate and a channel layer above the gate electrode. A source electrode may be above the channel layer and adjacent to a source area of the channel layer, and a drain electrode may be above the channel layer and adjacent to a drain area of the channel layer. A passivation layer may be above the channel layer and between the source electrode and the drain electrode, and a top dielectric layer may be above the gate electrode, the channel layer, the source electrode, the drain electrode, and the passivation layer. In addition, an air gap may be above the passivation layer and below the top dielectric layer, and between the source electrode and the drain electrode. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: December 27, 2017
    Publication date: September 10, 2020
    Inventors: Abhishek A. SHARMA, Van H. LE, Li Huey TAN, Tristan TRONIC, Benjamin CHU-KUNG
  • Publication number: 20200273952
    Abstract: Techniques are disclosed for forming germanium (Ge)-rich channel transistors including one or more dopant diffusion barrier elements. The introduction of one or more dopant diffusion elements into at least a portion of a given source/drain (S/D) region helps inhibit the undesired diffusion of dopant (e.g., B, P, or As) into the adjacent Ge-rich channel region. In some embodiments, the elements that may be included in a given S/D region to help prevent the undesired dopant diffusion include at least one of tin and relatively high silicon. Further, in some such embodiments, carbon may also be included to help prevent the undesired dopant diffusion. In some embodiments, the one or more dopant diffusion barrier elements may be included in an interfacial layer between a given S/D region and the Ge-rich channel region and/or throughout at least a majority of a given S/D region. Numerous embodiments, configurations, and variations will be apparent.
    Type: Application
    Filed: May 13, 2020
    Publication date: August 27, 2020
    Applicant: INTEL CORPORATION
    Inventors: GLENN A. GLASS, ANAND S. MURTHY, KARTHIK JAMBUNATHAN, BENJAMIN CHU-KUNG, SEUNG HOON SUNG, JACK T. KAVALIEROS, TAHIR GHANI, HAROLD W. KENNEL
  • Publication number: 20200266296
    Abstract: Integrated circuit transistor structures are disclosed that reduce band-to-band tunneling between the channel region and the source/drain region of the transistor, without adversely increasing the extrinsic resistance of the device. In an example embodiment, the structure includes one or more spacer configured to separate the source and/or drain from the channel region. The spacer(s) regions comprise a semiconductor material that provides a relatively high conduction band offset (CBO) and a relatively low valence band offset (VBO) for PMOS devices, and a relatively high VBO and a relatively low CBO for NMOS devices. In some cases, the spacer includes silicon, germanium, and carbon (e.g., for devices having germanium channel). The proportions may be at least 10% silicon by atomic percentage, at least 85% germanium by atomic percentage, and at least 1% carbon by atomic percentage. Other embodiments are implemented with III-V materials.
    Type: Application
    Filed: November 6, 2017
    Publication date: August 20, 2020
    Applicant: INTEL CORPORATION
    Inventors: Benjamin Chu-Kung, Jack T. Kavalieros, Seung Hoon Sung, Siddharth Chouksey, Harold W. Kennel, Dipanjan Basu, Ashish Agrawal, Glenn A. Glass, Tahir Ghani, Anand S. Murthy
  • Patent number: 10748993
    Abstract: Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: August 18, 2020
    Assignee: Intel Corporation
    Inventors: Van H. Le, Benjamin Chu-Kung, Harold Hal W. Kennel, Willy Rachmady, Ravi Pillarisetty, Jack T. Kavalieros
  • Publication number: 20200258982
    Abstract: Integrated circuit transistor structures and processes are disclosed that reduce n-type dopant diffusion, such as phosphorous or arsenic, from the source region and the drain region of a germanium n-MOS device into adjacent channel regions during fabrication. The n-MOS transistor device may include at least 70% germanium (Ge) by atomic percentage. In an example embodiment, source and drain regions of the transistor are formed using a low temperature, non-selective deposition process of n-type doped material. In some embodiments, the low temperature deposition process is performed in the range of 450 to 600 degrees C. The resulting structure includes a layer of doped mono-crystyalline silicon (Si), or silicon germanium (SiGe), on the source/drain regions. The structure also includes a layer of doped amorphous Si:P (or SiGe:P) on the surfaces of a shallow trench isolation (STI) region and the surfaces of contact trench sidewalls.
    Type: Application
    Filed: December 26, 2017
    Publication date: August 13, 2020
    Applicant: INTEL CORPORATION
    Inventors: Glenn A. Glass, Anand S. Murthy, Karthik Jambunathan, Cory C. Bomberger, Tahir Ghani, Jack T. Kavalieros, Benjamin Chu-Kung, Seung Hoon Sung, Siddharth Chouksey
  • Patent number: 10734488
    Abstract: Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.
    Type: Grant
    Filed: September 11, 2015
    Date of Patent: August 4, 2020
    Assignee: Intel Corporation
    Inventors: Matthew V. Metz, Willy Rachmady, Harold W. Kennel, Van H. Le, Benjamin Chu-Kung, Jack T. Kavalieros, Gilbert Dewey
  • Patent number: 10734511
    Abstract: An embodiment includes a field effect transistor, comprising: a source region comprising a first III-V material doped to a first conductivity type; a drain region comprising a second III-V material doped to a second conductivity type that is opposite the first conductivity type; a gate electrode disposed over a channel region comprising a third III-V material; and a first spacer, between the channel and drain regions, comprising a fourth III-V material having a charge carrier-blocking band offset from the third III-V material. Other embodiments are described herein.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: August 4, 2020
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Willy Rachmady, Jack T. Kavalieros, Matthew V. Metz, Benjamin Chu-Kung, Gilbert Dewey, Rafael Rios
  • Patent number: 10727339
    Abstract: Vertical semiconductor devices having selectively regrown top contacts and method of fabricating vertical semiconductor devices having selectively regrown top contacts are described. For example, a semiconductor device includes a substrate having a surface. A first source/drain region is disposed on the surface of the substrate. A vertical channel region is disposed on the first source/drain region and has a first width parallel with the surface of the substrate. A second source/drain region is disposed on the vertical channel region and has a second width parallel with and substantially greater than the first width. A gate stack is disposed on and completely surrounds a portion of the vertical channel region.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: July 28, 2020
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-Kung, Gilbert Dewey, Van H. Le, Jack T. Kavalieros, Marko Radosavljevic, Ravi Pillarisetty, Han Wui Then, Niloy Mukherjee, Sansaptak Dasgupta
  • Patent number: 10727138
    Abstract: A monocrystalline semiconductor layer is formed on a conductive layer on an insulating layer on a substrate. The conductive layer is a part of an interconnect layer. The monocrystalline semiconductor layer extends laterally on the insulating layer. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: July 28, 2020
    Assignee: Intel Corporation
    Inventors: Van H. Le, Marko Radosavljevic, Benjamin Chu-Kung, Rafael Rios, Gilbert Dewey
  • Publication number: 20200235246
    Abstract: Techniques are disclosed for forming thin-film transistors (TFTs) with low contact resistance. As disclosed in the present application, the low contact resistance can be achieved by intentionally thinning one or both of the source/drain (S/D) regions of the thin-film layer of the TFT device. As the TFT layer may have an initial thickness in the range of 20-65 nm, the techniques for thinning the S/D regions of the TFT layer described herein may reduce the thickness in one or both of those S/D regions to a resulting thickness of 3-10 nm, for example. Intentionally thinning one or both of the S/D regions of the TFT layer induces more electrostatic charges inside the thinned S/D region, thereby increasing the effective dopant in that S/D region. The increase in effective dopant in the thinned S/D region helps lower the related contact resistance, thereby leading to enhanced overall device performance.
    Type: Application
    Filed: January 10, 2018
    Publication date: July 23, 2020
    Applicant: INTEL CORPORATION
    Inventors: Abhishek A. Sharma, Van H. Le, Li Huey Tan, Tristan A. Tronic, Benjamin Chu-Kung, Jack T. Kavalieros, Tahir Ghani
  • Patent number: 10717381
    Abstract: A tie down anchor tension monitoring system includes a tension level monitoring module and at least one tie down anchoring point integrated into a cargo carrying space configured for connecting to a free end of a cargo tie down strap. The system further includes at least one tension level monitoring sensor integrated with the at least one tie down anchoring point, wherein the at least one tension monitoring sensor is configured to output a signal to the tension monitoring module that is indicative of a tension level of the cargo tie down strap.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: July 21, 2020
    Assignee: GM GLOBAL TECHNOLOGY OPERATIONS LLC
    Inventor: Benjamin Chu
  • Publication number: 20200227568
    Abstract: Embodiments herein describe techniques for a semiconductor device, which may include a substrate, and a U-shaped channel above the substrate. The U-shaped channel may include a channel bottom, a first channel wall and a second channel wall parallel to each other, a source area, and a drain area. A gate dielectric layer may be above the substrate and in contact with the channel bottom. A gate electrode may be above the substrate and in contact with the gate dielectric layer. A source electrode may be coupled to the source area, and a drain electrode may be coupled to the drain area. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: September 29, 2017
    Publication date: July 16, 2020
    Inventors: Van H. LE, Abhishek A. SHARMA, Benjamin CHU-KUNG, Gilbert DEWEY, Ravi PILLARISETTY, Miriam R. RESHOTKO, Shriram SHIVARAMAN, Li Huey TAN, Tristan A. TRONIC, Jack T. KAVALIEROS
  • Patent number: 10702815
    Abstract: Membranes suitable for use in membrane distillation are provided. Such membranes may include nano-fibrous layers with adjustable pore sizes. The membranes may include a hydrophobic nano fibrous scaffold and a thin hydrophilic protecting layer that can significantly reduce fouling and scaling problems.
    Type: Grant
    Filed: November 18, 2015
    Date of Patent: July 7, 2020
    Assignee: The Research Foundation for the State University of New York
    Inventors: Benjamin Chu, Benjamin S. Hsiao
  • Publication number: 20200212186
    Abstract: Embodiments related to transistors and integrated circuits having aluminum indium phosphide subfins and germanium channels, systems incorporating such transistors, and methods for forming them are discussed.
    Type: Application
    Filed: September 11, 2015
    Publication date: July 2, 2020
    Applicant: Intel Corporation
    Inventors: Matthew V. Metz, Willy Rachmady, Harold W. Kennel, Van H. Le, Benjamin Chu-Kung, Jack T. Kavalieros, Gilbert Dewey