Abstract: An atomic particle detection assembly includes one or more detectors that detect atomic particles. The detectors are positioned within a first chamber having a first operating pressure. The atomic particle detection assembly includes a junction apparatus supporting the detectors. The junction apparatus defines a second chamber having a second operating pressure that is different from the first operating pressure. Sensing electronics are attached to the detectors and the sensing electronics are housed within the second chamber of the junction apparatus.

Abstract: An atomic particle detection assembly includes one or more detectors that detect atomic particles. The detectors are positioned within a first chamber having a first operating pressure. The atomic particle detection assembly includes a junction apparatus supporting the detectors. The junction apparatus defines a second chamber having a second operating pressure that is different from the first operating pressure. Sensing electronics are attached to the detectors and the sensing electronics are housed within the second chamber of the junction apparatus.

Abstract: A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.

Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths.

Abstract: A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.

Abstract: A wafer processing apparatus characterized by having corrosion resistant connections for its electrical connections, gas feed-through channels, recessed areas, raised areas, MESA, through-holes such as lift-pin holes, threaded bolt holes, blind holes, and the like, with the special configurations employing connectors and fillers having excellent chemical resistant properties and optimized CTEs, i.e., having a coefficient of thermal expansion (CTE) that closely matches the CTE of the base substrate layer, the electrode(s), as well as the CTE of coating layer. In one embodiment, a nickel plated molybdenum insert is employed.

Abstract: A wafer processing apparatus characterized by having corrosion resistant connections for its electrical connections, gas feed-through channels, recessed areas, raised areas, MESA, through-holes such as lift-pin holes, threaded bolt holes, blind holes, and the like, with the special configurations employing connectors and fillers having excellent chemical resistant properties and optimized CTEs, i.e., having a coefficient of thermal expansion (CTE) that closely matches the CTE of the base substrate layer, the electrode(s), as well as the CTE of coating layer. In one embodiment, a filler composition comprising a glass-ceramic material is employed.

Abstract: Coupling components which prevent relative rotation between tubular members when break away torque forces are applied to the tubular members. In one embodiment, the invention is a locking ring for preventing relative axial rotation between two generally tubular members. The ring is shaped to receive a sealing gasket and has two side faces wherein each side face is shaped to frictionally engage one of the tubular members to thereby prevent relative axial rotation between the tubular members. The invention is also directed to a coupling including a locking ring. The tubular members are generally coaxially arranged such that the sealing faces face each other. The coupling comprises a sealing gasket captured between the sealing beads for sealing the coupling, wherein the frictional surfaces engage the sealing gasket to prevent relative rotation between the tubular members.

Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. The bridge fittings may be stacked to form multiple layers.

Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. The bridge fittings may be stacked to form multiple layers.

Abstract: Coupling components which prevent relative rotation between tubular members when break away torque forces are applied to the tubular members. In one embodiment, the invention is a locking ring for preventing relative axial rotation between two generally tubular members. The ring is shaped to receive a sealing gasket and has two side faces wherein each side face is shaped to frictionally engage one of the tubular members to thereby prevent relative axial rotation between the tubular members. The invention is also directed to a coupling including a locking ring. The tubular members are generally coaxially arranged such that the sealing faces face each other. The coupling comprises a sealing gasket captured between the sealing beads for sealing the coupling, wherein the frictional surfaces engage the sealing gasket to prevent relative rotation between the tubular members.

Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths.

Abstract: Couplings and coupling components which prevent relative rotation between tubular members when break away torque forces are applied to the tubular members. In one embodiment, the invention is a locking ring for preventing relative axial rotation between two generally tubular members. The ring is shaped to receive a sealing gasket and has two side faces wherein each side face is shaped to frictionally engage one of the tubular members to thereby prevent relative axial rotation between the tubular members. The invention is also directed to a coupling including a locking ring and a method of making a coupling having a locking ring to prevent relative rotation between the tubular members. In another preferred embodiment, the invention is a coupling comprising two generally tubular members each having a sealing end face, a raised, annular sealing bead, an inner bore, and a frictional surface located radially outward of the sealing bead.

Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths.

Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths.

Abstract: A modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may additionally comprise two or more ports, which one of said ports may be in fluid communication with a manifold on another substrate level. The bridge fittings may be mounted within a channel of a backing plate for structural support or in channel blocks of varying sizes. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths.

Abstract: Couplings and coupling components which prevent relative rotation between tubular members when break away torque forces are applied to the tubular members. In one embodiment, the invention is a locking ring for preventing relative axial rotation between two generally tubular members. The ring is shaped to receive a sealing gasket and has two side faces wherein each side face is shaped to frictionally engage one of the tubular members to thereby prevent relative axial rotation between the tubular members. The invention is also directed to a coupling including a locking ring and a method of making a coupling having a locking ring to prevent relative rotation between the tubular members. In another preferred embodiment, the invention is a coupling comprising two generally tubular members each having a sealing end face, a raised, annular sealing bead, an inner bore, and a frictional surface located radially outward of the sealing bead.

Abstract: A modular block assembly is provided for interconnecting fluid components of a fluid system in a reduced area. The system includes a base block having angularly disposed passages that receive fasteners in opposite, parallel end faces of the block. The fasteners allow adjacent base blocks to be connected in end-to-end fashion. The first passage extends through one of the end faces and communicates with an upper face of the block. Fluid components are selectively secured to the upper face of the base block to control or regulate fluid flow through the system as desired. Additional angle openings and fasteners, as well as additional fluid passages, may be provided in side wall faces of the base blocks. These additional passages permit transfer of fluid from one adjacent flow line to another. Each fluid passage end includes face seals allowing abutting engagement between the modular components to provide a sealed, continuous flow passage.