Patents by Inventor Benjamin Lipson

Benjamin Lipson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, substrate table, and method
    Patent number: 11988971
    Abstract: A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: May 21, 2024
    Assignees: ASML HOLDING N.V., ASML NETHERLANDS B.V.
    Inventors: Matthew Lipson, Satish Achanta, Benjamin David Dawson, Matthew Anthony Sorna, Iliya Sigal, Tammo Uitterdijk
  • Self-contained, adjustable disperser and mixer
    Patent number: 4898474
    Abstract: A mixing device for liquids is described, wherein improved control of the mix is achieved by restructuring the components so that the character of the mix can be observed easily and corrections effected simultaneously. The disperser/mixer incorporates a moveable and rotatable support structure attached to a piston-in-cylinder arrangement. Hydraulic pressure, pneumatic pressure, or a combination thereof in the cylinder is controlled from a unit on the support structure, rather than the base, through a modified piston fixed to the support structure and containing a passageway for hydraulic fluid, rather than through the cylinder.
    Type: Grant
    Filed: October 21, 1987
    Date of Patent: February 6, 1990
    Inventor: Benjamin Lipson