Abstract: Provided is a device for the emission of X-rays. The device includes a vacuum pump including a sealed peripheral casing containing a cathode which emits a flux of electrons, a rotary anode mounted at the end of the shaft of the vacuum pump, a collection device for collecting an emitted electron beam and at least one cooling element, disposed opposite one of the main radial faces of the rotary anode, which is fixed to one of the vacuum pump stator or to the sealed peripheral casing.

Abstract: The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4).

Abstract: A device in accordance with the invention for the emission of X-rays, comprises a vacuum pump the sealed peripheral casing whereof contains a cathode for emitting a flux of electrons, a rotary anode mounted at the end of the shaft of the vacuum pump and a collection device for collecting an emitted electron beam. This considerably reduces the overall size of the X-ray source and, thanks to the very fast and stable rotation of the rotary anode attached to the rotor of the vacuum pump, a source of very great brightness is produced. The rotary anode may be moved axially to compensate the wear that it suffers through the impact of the incident electron beam coming from the cathode. According to the invention the device further comprises at least one cooling element fixed to the vacuum pump stator or to the sealed peripheral casing opposite one of the main radial faces of the rotary anode to absorb radiated heat energy emitted by the rotary anode in operation.

Abstract: The EUV radiation source of the invention comprises an irradiation chamber (1) containing an irradiation zone (3) into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II—II) extending transversely relative to an optical axis (I—I). The irradiation zone (3) is in the proximity of a diaphragm (4) oriented on the optical axis (I—I) and putting the irradiation chamber (1) into communication with a transmission chamber (2). Power laser beams (5, 6) strike the stream of radiation-generator material in the irradiation zone (3) and produce EUV radiation which propagates through the diaphragm (4) and which is conditioned in the transmission chamber (2) by elliptical mirrors (13). Differential pumps (11, 12) maintain a pressure P2 in the transmission chamber (2) that is well below the pressure P1 in the irradiation chamber (1).

Abstract: The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4).

Abstract: The EUV radiation source of the invention comprises an irradiation chamber (1) containing an irradiation zone (3) into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II-II) extending transversely relative to an optical axis (I-I). The irradiation zone (3) is in the proximity of a diaphragm (4) oriented on the optical axis (I-I) and putting the irradiation chamber (1) into communication with a transmission chamber (2). Power laser beams (5, 6) strike the stream of radiation-generator material in the irradiation zone (3) and produce EUV radiation which propagates through the diaphragm (4) and which is conditioned in the transmission chamber (2) by elliptical mirrors (13). Differential pumps (11, 12) maintain a pressure P2 in the transmission chamber (2) that is well below the pressure P1 in the irradiation chamber (1).

Abstract: The machine includes a fixed disk (2) comprising a spiral wall (3), a mobile disk (4) also comprising a spiral wall (5) cooperating with that of the fixed disk, and means (11, 16, 22, 23) for driving circular translation movement of the mobile disk, the mobile disk being positioned axially by a system including a shoe (25, 32, 36) rubbing between two lateral abutments (26, 27-34, 35-39, 40), one member of the pair of members (i.e.

Abstract: A scroll type machine including a fixed disk (5) comprising a spiral working wall (6) and a mobile disk (7) equally comprising a spiral working wall (8) cooperating with that of the fixed disk, means for driving circular translation movement of the mobile disk, a sealing bellows (15) joined at one end to a member (14) fixed with respect to the circular translation movement of the mobile disk (7) and at its other end to a fixed part (1C) of the machine, said bellows (15) separating the fluid circuit from the mechanical parts driving the mobile disk, characterized in that the fixed disk (5) is joined on the side opposite the mobile disk (7) to a fixed central shaft (10) including a discharge passage (11), said central shaft being surrounded by said bellows (15), the space (16) between said bellows and said fixed central shaft constituting a suction passage, in that a hollow main rotary shaft (19) surrounds said bellows (15) and is carried by at least one bearing (23, 24-32) in a fixed frame (1), one end of said

Abstract: A positive-displacement machine comprising a piston situated in a casing. The outline of the piston is hypertrochoidal, as is the outline of the hollow inside volume of the casing. The piston has n axes of symmetry, and the casing has n+1 axes of symmetry. The piston rotates inside the casing in orbital motion about the axis .DELTA.c of the casing. To obtain the rotation in orbital motion, firstly the piston is freely rotatably mounted on a crank pin that has its axis offset relative to the axis of a supporting shaft that is coaxial with the axis .DELTA.c of the casing, the shaft being rotated, and secondly the surface of the piston and the surface of the hollow inside volume of the casing are equipped with permanent magnets creating magnetic repulsion forces.

Abstract: The machine includes a piston which is cylindrical in the mathematical sense, which has an axis .DELTA..sub.p, which is rotary, and which is situated in a cylindrical casing that has an axis .DELTA..sub.c, the piston having an outline that has .DELTA..sub.p axes of symmetry, the casing delimiting a hollow volume whose cross-section in a plane perpendicular to its axis .DELTA..sub.c has S.sub.c axes of symmetry, S.sub.p and S.sub.c differing from each other by unity. The axes .DELTA..sub.p and .DELTA..sub.c are parallel and are separated by a distance E, the piston and the casing delimiting at least three chambers between them, and the casing including at least one suction inlet and one delivery outlet. The positive-displacement machine further includes a ferromagnetic sprocket which has an axis .DELTA..sub.p, which is secured to the piston, which has N.sub.p teeth, and which is disposed inside a ferromagnetic toothed ring which has an axis .DELTA..sub.