Abstract: A method for polishing a metal layer (e.g. copper) on a workpiece is provided wherein relative motion is produced between the metal layer and a polishing surface and wherein the metal layer has a polish resistant film thereon. The metal layer is first pre-treated to substantially remove the polish resistant film. Next, the metal layer is polished at low pressure between the metal layer and the polishing surface in the presence of a polishing solution. The pretreating may be accomplished by, for example, sputtering, polishing the polish-resistant film in the presence of abrasive polishing solution, polishing the polish-resistant film at higher pressures between the film and the polishing surface and/or maintaining the temperature of the pretreating step to be substantially between 10 degrees Centigrade and 30 degrees Centigrade.

Abstract: An electrochemical apparatus is provided which deposits material onto or removes material from the surface of a workpiece. The apparatus comprises a polishing pad and a platen which is in turn comprised of a first conductive layer in contact with the polishing pad and coupled to a first potential, a second conductive layer coupled to a second potential, and a first insulating layer disposed between the first and second conductive layers. At least one electrical contact is positioned within the polishing pad and is electrically coupled to the second conductive layer. A reservoir is provided which places an electrolyte solution in contact with the polishing pad and the workpiece. A carrier positions and/or presses the workpiece against the polishing pad.

Abstract: An improved method for transport of particulate matter in a wellbore fluid, and particularly the transport of particulate matter in subterranean wells, such as hydrocarbon wells, is disclosed, the method being characterized by utilization of specified fibers to aid in transport of the particulate matter. Additional embodiments include the removal of particulate matter (particles) and particle deposits, such as from drill cuttings, during the drilling of wells, and the removal of particulate matter deposits in cleanout operations.

Abstract: A method for treating a wellbore (or well casing) and the contiguous wellbore area to remove scale (mineral deposits comprised of, e.g., BaSO4, CaCO3, etc.) in the context of hydrocarbon recovery and other applications is disclosed, said method including contacting the scale with a fluid comprised of an ionic liquid or liquids.

Abstract: Non-aqueous base wellbore fluids characterized by enhanced electrical conductivity due to formulation with specified ionic liquids are disclosed. Drilling, completion, and workover methods utilizing the wellbore fluids are also disclosed.

Abstract: An improved method for cleanout of subterranean wells, such as hydrocarbon wells, is disclosed, the method being characterized by utilization of specified translocating fibers and/or platelets to aid in reduction of undesired fluids in the wellbore.

Abstract: A photoresist-free method for making patterned films of metal oxides, metals, or other metal containing compounds is described. The method involves applying an amorphous film of a metal complex to a substrate. The film may be conveniently applied by spin coating using standard industry techniques. The metal complex used is photoreactive and undergoes a low temperature chemical reaction in the presence of light of a suitable wavelength. The end product of the reactions depends upon the atmosphere in which the reactions take place. Metal oxide films may be made in air. Patterned films may be made by exposing only selected portions of the film to light. Patterns of two or more materials may be laid down from the same film by exposing different parts of the film to light in different atmospheres. The resulting patterned film is generally planar. Separate planarization steps are not generally required.