Patents by Inventor Bernabe Arruza
Bernabe Arruza has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11964310Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: GrantFiled: January 6, 2023Date of Patent: April 23, 2024Assignee: Bruker Nano, Inc.Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire
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Publication number: 20230158555Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: ApplicationFiled: January 6, 2023Publication date: May 25, 2023Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire
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Patent number: 11577286Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: GrantFiled: June 15, 2021Date of Patent: February 14, 2023Assignee: Bruker Nano, Inc.Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire
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Patent number: 11391664Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: GrantFiled: May 17, 2019Date of Patent: July 19, 2022Assignee: Bruker Nano, Inc.Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire
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Publication number: 20210308724Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: ApplicationFiled: June 15, 2021Publication date: October 7, 2021Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire
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Patent number: 11040379Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: GrantFiled: July 19, 2019Date of Patent: June 22, 2021Assignee: Bruker Nano, Inc.Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire
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Publication number: 20190337025Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: ApplicationFiled: July 19, 2019Publication date: November 7, 2019Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire
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Publication number: 20190271631Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.Type: ApplicationFiled: May 17, 2019Publication date: September 5, 2019Inventors: Tod Evan Robinson, Bernabe Arruza, Kenneth Gilbert Roessler, David Brinkley, Jeffrey E. LeClaire