Patents by Inventor Bernard Matt

Bernard Matt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Parallel inspection of semiconductor wafers by a plurality of different inspection stations to maximize throughput
    Patent number: 6320402
    Abstract: A system for inspecting semiconductor wafers of at least one lot of semiconductor wafers for proper integrated circuit fabrication includes multiple different inspection stations. Each of the different inspection stations inspects a respective integrated circuit fabrication feature of a semiconductor wafer. In addition, a semiconductor wafer robotic handling system, that is coupled to each of the inspection stations, transfers the semiconductor wafers between the inspection stations. Furthermore, a host server is coupled to the inspection stations and the semiconductor wafer robotic handling system. The host server controls the semiconductor wafer robotic handling system to transfer a predetermined one of the semiconductor wafers to a predetermined one of the inspection stations at a predetermined time.
    Type: Grant
    Filed: February 3, 2000
    Date of Patent: November 20, 2001
    Inventors: Khoi A. Phan, Bernard Matt, Nicholas R. Maccrae