Abstract: A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6?. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6? and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.

Abstract: A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6?. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6? and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.

Abstract: In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF.

Abstract: A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6?. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6? and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.

Abstract: The disclosure relates to a support structure for an optical element and an optical element module including such a support structure. The disclosure also relates to a method of supporting an optical element. The disclosure may be used in the context of photolithography processes for fabricating microelectronic devices, such as semiconductor devices, or in the context of fabricating devices, such as masks or reticles, used during such photolithography processes.

Abstract: In one embodiment, an actuator for positioning of mirrors in an optical system is provided and includes an actuator base and a reaction mass assembly. The reaction mass assembly includes a reaction mass support member having biasing features formed as a part thereof and a reaction mass that is coupled to the biasing features such that the reaction mass is suspended on biasing elements in six degrees of freedom (DOF). The support member is fixedly connected to the actuator base; however, the reaction mass is not directly attached to the actuator base but rather is supported in the reaction mass support member in a manner that allows it to have six DOF.

Abstract: The present invention relates to a positioning apparatus. The positioning apparatus comprises at least one position sensor, at least one position controller and at least one position actuator, wherein the or each position sensor measures the position of a position controlled device, wherein the or each position controller uses measurement signals provided by the or each position sensor as input signals, and wherein output signals generated by the or each position controller are used by the or each position actuator to control the position of said position-controlled device.