Abstract: A mechanical seal has a housing having a collecting space for a coolant/lubricant medium. A sleeve is disposed in the housing. A counter ring is disposed in the housing and fixedly connected to the sleeve. A slide ring is disposed in the housing and interacts with the counter ring. At least one inlet conduit communicating with the collecting space is provided. The at least one inlet conduit is positioned between a radial bottom of the housing and a radial ring segment of the sleeve.

Abstract: A method for manufacturing a semiconductor wafer which is coated on one s and provided with a finish has a) the semiconductor wafer being subjected to a first treatment (double-sided finish) which produces a finish on both sides of the semiconductor wafer at the same time; has b) at least one coating being produced on one side of the semiconductor wafer; and has c) the semiconductor wafer being subjected to a second treatment which produces a double-sided finish.

Abstract: A carrier for a semiconductor wafer has at least three protrusions on which he edge of the semiconductor wafer is supported so that the semiconductor wafer is positioned essentially horizontal. The carrier does not make contact with the front side and the rear side of the semiconductor wafer. The protrusions are shaped so that the edge of the semiconductor wafer is supported exclusively below an imaginary central plane in the center between the front side and the rear side of the semiconductor wafer. The carrier is preferably used in the treatment of semiconductor wafers at temperatures of at least 200.degree. C.