Abstract: A method for controlling a vacuum valve arranged between two vacuum chambers comprises a valve body with a valve opening, a closure member which closes the valve opening in a closed state of the vacuum valve and which releases the valve opening in an open state of the vacuum valve, wherein, for closing the valve opening by the closure member in the closed state of the vacuum valve, at least one flexible seal contacts a sealing surface of the vacuum valve, which sealing surface is acted upon by a pressing force in the closed state of the vacuum valve, an actuating device for opening and closing the vacuum valve with at least one actuator by which the seal is placed against the sealing surface for closing the vacuum valve, and with a control unit which controls this at least one actuator, pressure measurement values being supplied to this control unit as input signals from pressure sensors which detect the respective pressure in the two vacuum chambers, wherein a differential pressure between the two vacuum cha

Abstract: A regulating vacuum valve comprises a valve body with a through-channel a closure member which is adjustable over a control path between a closed position of the regulating vacuum valve in which it contacts a valve seat and closes the through-channel and an open position of the regulating vacuum valve in which it is raised from the valve seat, an adjusting device which has a drive unit for adjusting the closure member over the control path, a carrying unit which carries the closure member and is supported so as to be displaceable relative to the closure member. The carrying unit is arranged in the through-channel and is secured to the valve body, and the carrying unit has a chamber which is sealed relative to the through-channel and in which the adjusting device or at least a portion thereof is arranged.

Abstract: A closure device for a vacuum closure of at least one opening in a wall having a valve place, at least one piston-cylinder unit, at least one carrier unit, at least one cylinder bore hole, at least two sealing rings, and a line. The valve plate is associated with an opening and is displaceable between an open position in which it releases the opening, a position in which it covers the opening but is raised from the wall and a closed position in which it covers the opening and contacts the wall. The at least one piston-cylinder unit serves to displace the valve to the different positions and includes a pneumatically actuated piston. At least one carrier unit is connected to a piston rod which serves to displace the valve to the different positions.

Abstract: A regulating vacuum valve comprises a valve body with a through-channel a closure member which is adjustable over a control path between a closed position of the regulating vacuum valve in which it contacts a valve seat and closes the through-channel and an open position of the regulating vacuum valve in which it is raised from the valve seat, an adjusting device which has a drive unit for adjusting the closure member over the control path, a carrying unit which carries the closure member and is supported so as to be displaceable relative to the closure member. The carrying unit is arranged in the through-channel and is secured to the valve body, and the carrying unit has a chamber which is sealed relative to the through-channel and in which the adjusting device or at least a portion thereof is arranged.

Abstract: Closure device for vacuum closure of at least one opening (2) in a wall (1), comprising a valve plate (3) which is associated with a respective opening and which is displaceable between an open position in which it releases the opening, a position in which it covers the opening but is raised from the wall, and a closed position in which it covers the opening and contacts the wall, at least one piston-cylinder unit (30) which serves to displace the valve plate (3) between its open position and its position in which it covers the opening (2) but is raised from the wall and which comprises a pneumatically actuated piston (36) which is arranged in a cylinder housing (35) and which is outfitted with a piston rod (29) leading out of the cylinder housing through a bore hole, at least one carrier unit (6) which is connected to the piston rod (29) of the at least one piston-cylinder unit (30) and which is associated with a respective valve plate (3), has at least one cylinder bore hole (7) in which is arranged a pneum

Abstract: A vacuum valve comprises a wall with a valve opening and a valve seat, a valve plate which is pressed against the valve seat in the closed state, an elastic sealing ring which is arranged at the valve plate or at the valve seat and, in the closed state of the valve, is pressed by a pressing force against a sealing surface arranged at the valve seat or at the valve plate and seals the valve opening, and a supporting ring which is made of plastic and which is arranged at the valve plate or at the valve seat and, at least in the closed state of the vacuum valve, lies closer to the valve opening than the sealing ring, viewed from the sealing ring, and limits the pressing force acting on the sealing ring in the closed state of the vacuum valve.

Abstract: A linear motion leadthrough for a rod which has a first end, a second end and an outer surface and whose first end projects into a vacuum area of a vacuum installation while its second end is located outside of the vacuum area, comprises: a bushing which has an inner wall and through which the rod extends and which is displaceable linearly relative to the rod, at least one elastomer sealing ring for sealing the rod relative to the bushing which is secured to the inner wall of the bushing or to the outer surface of the rod, wherein the sealing ring is lubricated by a lubricant, and a bellows which is arranged inside the vacuum area, has a first end and a second end, encloses a portion of the rod located inside the vacuum area and delimits a space located between the rod and the bellows from a space lying outside the bellows, and whose first end is fastened to the rod and whose second end is fastened to the bushing or to a part enclosing the bushing, wherein at least one opening is provided which connects the s

Abstract: A linear motion leadthrough for a rod (2) which has a first end (7), a second end (8) and an outer surface (27) and whose first end (7) projects into a vacuum area (6) of a vacuum installation while its second end (8) is located outside of the vacuum area, comprises:

Abstract: A diaphragm bellows device comprises a diaphragm bellows with a plurality of successive diaphragms which are welded together alternately at the outer and inner edges, wherein the length of the diaphragm bellows can be adjusted between an expanded state and a contracted state, and a plurality of sleeve parts which surround the successive diaphragms and which, together, enclose the successive diaphragms also in the expanded state of the diaphragm bellows over its entire longitudinal extension and overlap to a greater or lesser extent in axial direction of the diaphragm bellows depending on the adjusted length of the diaphragm bellows, wherein at least one of the sleeve parts is held on the welded outer edges of two adjoining diaphragms by a snap connection.

Abstract: A suspension of a valve plate of a vacuum valve at a valve rod has a bearing block of rubber-elastic material with first and second side surfaces, one of which side surfaces is fastened to the valve rod or to a plate which is rigidly connected with the latter, and the other side surface is fastened to the valve plate or to a plate which is rigidly, connected with the latter, wherein an inelastic force transmission part is embedded in the rubber-elastic material of the bearing block and extends at oppositely located points or along oppositely located lines up to the side surfaces of the bearing block.

Abstract: A suspension of a valve plate of a vacuum valve at a valve rod comprises a bearing block (16) of rubber-elastic material with first and second side surfaces (21, 22), one of which side surfaces (21) is fastened to the valve rod (6) or to a plate (14) which is rigidly connected with the latter, and the other side surface (22) is fastened to the valve plate (5) or to a plate which is rigidly connected with the latter, wherein an inelastic force transmission part (17) is embedded in the rubber-elastic material of the bearing block (16) and extends at oppositely located points or along oppositely located lines up to the side surfaces of the bearing block. (FIG.

Abstract: A vacuum valve comprises a wall (2) with a valve opening (1) and a valve seat (4), a valve plate (3) which is pressed against the valve seat (4) in the closed state, an elastic sealing ring (19, 19′) which is arranged at the valve plate (3) or at the valve seat (4) and, in the closed state of the valve, is pressed by a pressing force against a sealing surface arranged at the valve seat or at the valve plate and seals the valve opening (1), and a supporting ring (20, 20′, 20″) which is made of plastic and which is arranged at the valve plate (3) or at the valve seat (4) and, at least in the closed state of the vacuum valve, lies closer to the valve opening (1) than the sealing ring, viewed from the sealing ring, and limits the pressing force acting on the sealing ring in the closed state of the vacuum valve.

Abstract: A vacuum valve for separating two vacuum chambers and including a valve body having an opening and a valve seat having two sealing surfaces encompassing the valve opening, and a valve slide including a closing member displaceable transverse displaceable transverse to the flow direction of the valve, which is defined by the axial direction of the valve body opening, and having two wedge-shaped, tapering toward each other side surfaces, with the slide further including, elastomeric, circumferentially closed seals provided on the side surfaces of the closing member, and with respective sealing surfaces of the valve seat and respective side surfaces of the closing member extending parallel to each other and forming, over their entire extent, with flow direction of the valve, an angle greater than 45°.