Patents by Inventor Bernhard Goetze

Bernhard Goetze has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam system and methods
    Patent number: 10410828
    Abstract: Disclosed is a charged particle beam system comprising a charged particle beam column having a charged particle source forming a charged particle beam, an objective lens and a first deflection system for changing a position of impingement of the charged particle beam in a sample plane. The system further comprises a sample chamber comprising a sample stage for holding a sample to be processed, and a controller configured to create and store a height map of a sample surface. The controller is further configured to dynamically adjust the objective lens of the charged particle beam in dependence on a position of impingement of the charged particle beam according to the height map.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: September 10, 2019
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Chuong Huynh, Bernhard Goetze, John A. Notte, IV, Diane Stewart
  • CHARGED PARTICLE BEAM SYSTEM AND METHODS
    Publication number: 20190189392
    Abstract: Disclosed is a charged particle beam system comprising a charged particle beam column having a charged particle source forming a charged particle beam, an objective lens and a first deflection system for changing a position of impingement of the charged particle beam in a sample plane. The system further comprises a sample chamber comprising a sample stage for holding a sample to be processed, and a controller configured to create and store a height map of a sample surface. The controller is further configured to dynamically adjust the objective lens of the charged particle beam in dependence on a position of impingement of the charged particle beam according to the height map.
    Type: Application
    Filed: February 26, 2019
    Publication date: June 20, 2019
    Inventors: Chuong Huynh, Bernhard Goetze, John A. Notte, IV, Diane Stewart
  • CHARGED PARTICLE BEAM SYSTEM AND METHODS
    Publication number: 20160203948
    Abstract: Disclosed is a charged particle beam system comprising a charged particle beam column having a charged particle source forming a charged particle beam, an objective lens and a first deflection system for changing a position of impingement of the charged particle beam in a sample plane. The system further comprises a sample chamber comprising a sample stage for holding a sample to be processed, and a controller configured to create and store a height map of a sample surface. The controller is further configured to dynamically adjust the objective lens of the charged particle beam in dependence on a position of impingement of the charged particle beam according to the height map.
    Type: Application
    Filed: December 21, 2015
    Publication date: July 14, 2016
    Inventors: Chuong Huynh, Bernhard Goetze, John A. Notte, IV, Diane Stewart
  • User interface for computer screen
    Patent number: D608787
    Type: Grant
    Filed: April 14, 2008
    Date of Patent: January 26, 2010
    Assignees: Carl Zeiss MicroImaging GmbH, Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.
    Inventors: Christopher Power, Markus Turber, Daniel Mauch, Bernhard Goetze, Fabian Hermann, Frank Hecht, Joerg Engel, Steffen Suepple, Stefan Brandys