Abstract: System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

Abstract: System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

Abstract: System and method for nanoscale X-ray imaging of biological specimen. The imaging system comprises an X-ray source including a plurality of spatially and temporally addressable electron sources, an X-ray detector arranged such that incident X-rays are oriented normal to an incident surface of the X-ray detector and a stage arranged between the X-ray source and the X-ray detector, the stage configured to have mounted thereon a biological specimen through which X-rays generated by the X-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the stage to acquire a set of intensity data by the X-ray detector as the stage moves along a three-dimensional trajectory.

Abstract: System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

Abstract: System and method for nanoscale X-ray imaging of biological specimen. The imaging system comprises an X-ray source including a plurality of spatially and temporally addressable electron sources, an X-ray detector arranged such that incident X-rays are oriented normal to an incident surface of the X-ray detector and a stage arranged between the X-ray source and the X-ray detector, the stage configured to have mounted thereon a biological specimen through which X-rays generated by the X-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the stage to acquire a set of intensity data by the X-ray detector as the stage moves along a three-dimensional trajectory.

Abstract: System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.