Abstract: Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.

Abstract: A sensor system is disclosed that includes a plurality of sensors, a deployment system for deploying the sensors, a control and charging system for receiving sensor data and optionally charging the batteries within the sensors, and one or more algorithms employed by the sensor system for processing, analyzing, and otherwise using data received by the plurality of sensors.

Abstract: Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.

Abstract: Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.

Abstract: A valve control system that includes a gain controller for controlling the linear response of a valve. The system includes a linearization control system coupled to the gain controller to determine a gain value to control the linear response time of the valve and a set point filter coupled to the linearization control system to filter a set point value. The linearization control system determines the gain value from the filtered set point value, at least one real-time fluid parameter value, valve model data, an actuator gain, and a valve model gain.

Abstract: A mass flow controller that includes a linearization system to control the linear response of a valve in order to control the gain of the mass flow controller. The linearization system includes a flow modeling system for processing at least one of a fluid type, a flow rate, a pressure, and a temperature value signal relating to flow of the fluid through a flow path and determining fluid properties. The linearization system also includes a valve modeling system to determine the required operational characteristics of the valve according to valve specifications, a desired flow rate, and the determined fluid properties. The linearization system determines a gain to control the lift of the valve in order to acquire a desired fluid flow rate. The gain is determined by calculating the derivative of predicted lift with respect to fluid flow and the derivative of drive with respect to predicted lift.

Abstract: A mass flow controller that includes a linearization system to control the linear response of a valve in order to control the gain of the mass flow controller. The linearization system includes a flow modeling system for processing at least one of a fluid type, a flow rate, a pressure, and a temperature value signal relating to flow of the fluid through a flow path and determining fluid properties. The linearization system also includes a valve modeling system to determine the required operational characteristics of the valve according to valve specifications, a desired flow rate, and the determined fluid properties. The linearization system determines a gain to control the lift of the valve in order to acquire a desired fluid flow rate. The gain is determined by calculating the derivative of predicted lift with respect to fluid flow and the derivative of drive with respect to predicted lift.

Abstract: A valve control system that includes a gain controller for controlling the linear response of a valve. The system includes a linearization control system coupled to the gain controller to determine a gain value to control the linear response time of the valve and a set point filter coupled to the linearization control system to filter a set point value. The linearization control system determines the gain value from the filtered set point value, at least one real-time fluid parameter value, valve model data, an actuator gain, and a valve model gain.

Abstract: The disclosed embodiments include a method, apparatus, and computer program product for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rate of decay measurement.

Abstract: Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.

Abstract: The disclosed embodiments include systems and methods to dynamically configure data values stored on a mass flow controller (MFC). In one embodiment, the MFC includes an inlet for receiving fluid, a flow path, a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path, and a valve for regulating a flow of the fluid out of an outlet of the MFC. The MFC also includes a storage medium having a fluid model of the fluid and a file system for configuring the fluid model. The MFC further includes a processor operable to perform operations including receiving instructions to configure the fluid model, obtaining MFC data indicative of a change to the fluid model, and utilizing the file system to dynamically update the fluid model with MFC data indicative of the change in the fluid model.

Abstract: The disclosed embodiments include several embodiments of a mass flow controller and methods for configuring a mass flow controller. For example, in one embodiment, the method includes automatically displaying a current configuration parameter, such as, but not limited to, a MacID and/or baud rate, in response to receiving power, from an external device, at a communication interface, such as, but not limited to, a near-field communication interface and/or a universal serial bus communication interface of the mass flow controller. The method adjusts the configuration parameter based on user input and stores the configuration parameter in memory while being powered by the external device.

Abstract: The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter without requiring any software modification to a tool/tool controller in which the mass flow controller is being utilized. For example, the disclosed embodiments include a mass flow controller comprising an internal valve configured to receive a first pneumatic line coupled to a tool pilot valve and couple a second pneumatic line from the internal valve to an external isolation valve upstream of the inlet. The mass flow controller also includes at least one processing component configured to execute instructions to perform an in-situ rate of decay measurement after executing instructions to close the external isolation valve by using the internal valve to block airflow being received through the first pneumatic line.

Abstract: The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter. For example, in one embodiment, a self-validating mass flow controller is disclosed that does not require any software modification to a tool/tool controller in which the mass flow controller is being utilized. In other embodiments, a self-validating mass flow controller is disclosed that does not require any hardware or mechanical changes to an existing mass flow controller. Still, the disclosed embodiments further include a self-validating mass flow controller that is configured to determine valve leak and sensor offset simultaneously for performing real time in-situ correction of a mass flow controller's output for zero offset or zero drift in the presence of valve leak.

Abstract: A mass flow controller includes a fluid inlet, a fluid outlet, and a conduit defining a flow path along which the fluid flows through the mass flow controller. The mass flow controller includes an inlet block having an inlet aperture, an inlet channel fluidly coupled to the conduit, and one or more restrictors positioned along the flow path between the inlet aperture and inlet channel to minimize flow perturbations when a rate of decay measurement is taken or when flow the amount of pressure supplied to the valve inlet is otherwise interrupted.

Abstract: The disclosed embodiments include a method, apparatus, and computer program product for verifying a performance of a mass flow controller or mass flow meter on a tool. For example, the disclosed embodiments include a method and a mass flow controller configured to perform, in-situ, by the mass flow controller, a rate of decay measurement during on-line operation of the tool to identify valve leak issues and/or for performing a flow measurement.

Abstract: The disclosed embodiments include several embodiments of a mass flow controller and methods for configuring a mass flow controller. For example, in one embodiment, the method includes automatically displaying a current configuration parameter, such as, but not limited to, a MacID and/or baud rate, in response to receiving power, from an external device, at a communication interface, such as, but not limited to, a near-field communication interface and/or a universal serial bus communication interface of the mass flow controller. The method adjusts the configuration parameter based on user input and stores the configuration parameter in memory while being powered by the external device.

Abstract: The disclosed embodiments include a method, apparatus, and computer program product for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rate of decay measurement.

Abstract: A mass flow controller includes a fluid inlet, a fluid outlet, and a conduit defining a flow path along which the fluid flows through the mass flow controller. The mass flow controller includes an inlet block having an inlet aperture, an inlet channel fluidly coupled to the conduit, and one or more restrictors positioned along the flow path between the inlet aperture and inlet channel to minimize flow perturbations when a rate of decay measurement is taken or when flow the amount of pressure supplied to the valve inlet is otherwise interrupted.

Abstract: The disclosed embodiments include a method, apparatus, and computer program product for verifying a performance of a mass flow controller or mass flow meter on a tool. For example, the disclosed embodiments include a method and a mass flow controller configured to perform, in-situ, by the mass flow controller, a rate of decay measurement during on-line operation of the tool to identify valve leak issues and/or for performing a flow measurement.