Patents by Inventor Bich-Yen Nguygen

Bich-Yen Nguygen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for deposition on a semiconductor wafer
    Patent number: 4486465
    Abstract: A nitride-coated boat is used in a method for depositing phosphosilicate glass (PSG) on semiconductor wafers. Because stainless steel is the material typically used for the boat for PSG deposition, the linear coefficient of thermal expansion of the boat is significantly greater than that of PSG. Consequently, cooling the boat after PSG deposition tends to cause flaking of PSG from the boat. The nitride-coating on the boat buffers the contraction differential between the PSG and stainless steel to significantly reduce flaking of PSG.
    Type: Grant
    Filed: September 30, 1983
    Date of Patent: December 4, 1984
    Assignee: Motorola, Inc.
    Inventor: Bich-Yen Nguygen