Patents by Inventor Bill Hinsberg

Bill Hinsberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for forming features of 50 nm or less half-pitch with chemically amplified resist imaging
    Patent number: 7090963
    Abstract: Lithographic imaging of 50 nm (or less) half-pitch features in chemically amplified resists (commonly used in the manufacture of integrated circuits) is enabled by the use of reduced temperature post-exposure processing and low activation energy chemically amplified resists. The post-exposure processing preferably involves ambient to moderately elevated temperature and the presence of a deprotection reaction-dependent co-reactant (e.g., water).
    Type: Grant
    Filed: June 25, 2003
    Date of Patent: August 15, 2006
    Assignee: International Business Machines Corporation
    Inventors: David R. Medeiros, Wu-Song Huang, Gregory M. Wallraff, Bill Hinsberg, Frances Houle
  • PROCESS FOR FORMING FEATURES OF 50 NM OR LESS HALF-PITCH WITH CHEMICALLY AMPLIFIED RESIST IMAGING
    Publication number: 20040265747
    Abstract: Lithographic imaging of 50 nm (or less) half-pitch features in chemically amplified resists (commonly used in the manufacture of integrated circuits) is enabled by the use of reduced temperature post-exposure processing and low activation energy chemically amplified resists. The post-exposure processing preferably involves ambient to moderately elevated temperature and the presence of a deprotection reaction-dependent co-reactant (e.g., water).
    Type: Application
    Filed: June 25, 2003
    Publication date: December 30, 2004
    Applicant: International Business Machines Corporation
    Inventors: David R. Medeiros, Wu-Song Huang, Gregory M. Wallraff, Bill Hinsberg, Frances Houle