Abstract: Trenches in which to form a back side isolation structure for an array of CMOS image sensors are formed by a cyclic process that allows the trenches to be kept narrow. Each cycle of the process includes etching to add a depth segment to the trenches and coating the depth segment with an etch-resistant coating. The following etch step will break through the etch-resistant coating at the bottom of the trench but the etch-resistant coating will remain in the upper part of the trench to limit lateral etching and substrate damage. The resulting trenches have a series of vertically spaced nodes. The process may result in a 10% increase in photodiode area and a 30-40% increase in full well capacity.

Abstract: A method for recognizing a deburring trajectory, relevant to be performed by a controller or a computer, includes the steps of: according to a process flow of a workpiece, analyzing a CAD file of the workpiece, determining a burr processing area and obtaining a mathematical model of boundary contour curve; applying a linear contour sensor to scan the workpiece to obtain contour section information of the workpiece; performing curve fitting upon the contour section information of the workpiece and the mathematical model of boundary contour curve so as to obtain a boundary curve function; and, utilizing the boundary curve function to determine deburring position information of the workpiece and to further generate a processing path. In addition, a system for recognizing a deburring trajectory is also provided.

Abstract: An automated calibration system for a workpiece coordinate frame of a robot includes a physical image sensor having a first image central axis, and a controller for controlling the physical image sensor adapted on a robot to rotate by an angle to set up a virtual image sensor having a second image central axis. The first and the second image central axes are intersected at an intersection point. The controller controls the robot to repeatedly move back and forth a characteristic point on the workpiece between these two axes until the characteristic point overlaps the intersection point. The controller records a calibration point including coordinates of joints of the robot, then the controller moves another characteristic point and repeats the foregoing movement to generate several other calibration points. According to the calibration points, the controller calculates relative coordinates of a virtual tool center point and the workpiece to the robot.

Abstract: A method for recognizing a deburring trajectory, relevant to be performed by a controller or a computer, includes the steps of: according to a process flow of a workpiece, analyzing a CAD file of the workpiece, determining a burr processing area and obtaining a mathematical model of boundary contour curve; applying a linear contour sensor to scan the workpiece to obtain contour section information of the workpiece; performing curve fitting upon the contour section information of the workpiece and the mathematical model of boundary contour curve so as to obtain a boundary curve function; and, utilizing the boundary curve function to determine deburring position information of the workpiece and to further generate a processing path. In addition, a system for recognizing a deburring trajectory is also provided.

Abstract: A system for establishing a junction trace of an assembly includes a surface model creating module, a processing module, and a material inspection module. The assembly includes a first part and a second part assembled with each other. The surface model creating module scans the first part and the second part to separately establish first surface model data and second surface model data. The processing module establishes assembled surface model data according to the first surface model data and the second surface model data, determines a junction region from the assembled surface model data, and determines inspection points mapped on the assembly according to the junction region. The material inspection module inspects materials of the assembly at the inspection points. The processing module establishes a junction trace of the first part and the second part in the assembly according to a material inspection result.

Abstract: Firstly, a robotic arm drives a projection point of tool projected on test plane to perform relative movement relative to a reference point of a test plane. Then, conversion relationship is established according to the relative movement. Then, a tool axis vector relative to an installation surface reference coordinate system of the robotic arm is obtained. Then, calibration point information group obtaining step is performed, wherein the calibration point information group obtaining step includes: (a1) the robotic arm drives a tool center point to coincide with a reference point of the test plane and records calibration point information group; (a2) the robotic arm drives the tool to change angle of the tool; and (a3) steps (a1) and (a2) are repeated to obtain several calibration point information groups. Then, tool center point coordinate relative to the installation surface reference coordinate system is obtained according to the calibration point information groups.

Abstract: A system for establishing a junction trace of an assembly includes a surface model creating module, a processing module, and a material inspection module. The assembly includes a first part and a second part assembled with each other. The surface model creating module scans the first part and the second part to separately establish first surface model data and second surface model data. The processing module establishes assembled surface model data according to the first surface model data and the second surface model data, determines a junction region from the assembled surface model data, and determines inspection points mapped on the assembly according to the junction region. The material inspection module inspects materials of the assembly at the inspection points. The processing module establishes a junction trace of the first part and the second part in the assembly according to a material inspection result.

Abstract: An automated calibration system for a workpiece coordinate frame of a robot includes a physical image sensor having a first image central axis, and a controller for controlling the physical image sensor adapted on a robot to rotate by an angle to set up a virtual image sensor having a second image central axis. The first and the second image central axes are intersected at an intersection point. The controller controls the robot to repeatedly move back and forth a characteristic point on the workpiece between these two axes until the characteristic point overlaps the intersection point. The controller records a calibration point including coordinates of joints of the robot, then the controller moves another characteristic point and repeats the foregoing movement to generate several other calibration points. According to the calibration points, the controller calculates relative coordinates of a virtual tool center point and the workpiece to the robot.