Abstract: Apparatus for measuring a characteristic of motion and methods for its manufacture are disclosed in which a sensor structure includes a support structure, and a mass suspended from such support structure by a spring connecting arrangement and electrical devices for measuring displacement of the mass which results from a force applied to the support structure. An apparatus is provided where the mechanical spring constant of the connecting arrangement of the sensor structure is provided to be a high value representative of a strong, stiff spring which resists breaking due to high forces applied to it, and where an electric spring constant is provided to yield a small effective sensor spring constant K.sub.eff =K.sub.m -K.sub.e. Methods are also provided to manufacturing the apparatus by specifying the mechanical spring constant and providing an electric spring constant which will yield a desired effective spring constant which produces a desired characteristic of the sensor structure.