Abstract: A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.

Abstract: A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.

Abstract: Disclosed is a shell side contactor which can be used to form ozonated water. The contactor includes a shell and a plurality of porous perfluoroalkoxy resin thermoplastic hollow fibers that are potted at each end of the shell. The perfluoroalkoxy resin hollow fibers can be unskinned, skinned on their inner surface, or skinned on their outer surfaces. The contactor is provided with a spacer that spreads the hollow fibers adjacent an inlet to the shell, thereby permitting liquid flow at desirably high flow rates with acceptable pressure drop through the shell. The mass transfer efficiency of the contactor can be enhanced by jetting water into the fiber bundle and introducing gaps into the bundle.

Abstract: The present invention includes apparatus and methods for producing a conditioned immersion fluid for use in an immersion lithography process. The conditioned immersion fluid protects the immersion system lens and reduces or eliminates deposition of contaminants onto the lens that can adversely affect the lens transmission and durability of an immersion lithography system.

Abstract: Disclosed is a shell side contactor which is highly efficient for forming relatively high concentration of ozonated water comprising a shell containing perfluoroalkoxy resin thermoplastic hollow fibers used as a porous barrier. The perfluoroalkoxy resin comprises a copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether or a tetrafluoroethyl-co-hexafluoropropylene (FEP) copolymer. The perfluoroalkoxy resin hollow fibers can be unskinned, skinned on their inner surface or skinned on their outer surfaces. The device is provided with spacer means for separating unpotted hollow fibers adjacent an inlet to the shell, thereby permitting liquid flow through the shell at desirably high flow rates with acceptable pressure drop through the shell.

Abstract: The invention pertains to a method for removing metallic ions and/or particulate material from an aqueous acid solution using particle removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligand groups (e.g., macrocycle or other similar chelating ligands) that possess high equilibrium binding constants for ion and particulate removal. The method is particularly useful for simultaneously filtering/purifying aqueous hydrofluoric or hydrochloric acid.

Abstract: The invention pertains to a method for removing metallic ions and/or particulate material from an aqueous acid solution using particle removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligand groups (e.g., macrocycle or other similar chelating ligands) that possess high equilibrium binding constants for ion and particulate removal. The method is particularly useful for simultaneously filtering/purifying aqueous hydrofluoric or hydrochloric acid.

Abstract: The invention pertains to a method for simultaneously removing metallic ions and particulate material from a pH neutral solution using particle-removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligands that possess the capacity and high equilibrium binding constants for ion removal. The method is particularly useful for simultaneously filtering/purifying deionized water.

Abstract: The invention pertains to a method for removing metallic ions and/or particulate material from a pH neutral solution using particle-removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligands that possess the capacity and high equilibrium binding constants for ion removal. The method is particularly useful for simultaneously filtering/purifying deionized water.

Abstract: Compositions and methods for selectively binding metal ions from a source solution comprise using a polyhydroxypyridinone-containing ligand covalently bonded to a membrane support having the formula M—A—L(HOPO)n. M is a membrane having a hydrophilic surface, A is a covalent linkage mechanism, L is a ligand carrier, HOPO is a hydroxypyridinone appropriately spaced on the ligand carrier to provide a minimum of six functional coordination metal binding sites, and n is an integer of 3 to 6. The separation is accomplished by passing a source solution containing the ions to be separated through a cartridge containing the membrane-ligand composition, causing the selected ions to be complexed to the HOPO ligands and subsequently removing the selected ions from the cartridge by passing an aqueous receiving solution through the cartridge and quantitatively stripping the selected ions from the HOPO ligand.