Patents by Inventor Bo Feng

Bo Feng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11784242
    Abstract: A manufacturing process and device are provided in which a first opening in formed within a substrate. The first opening is reshaped into a second opening using a second etching process. The second etching process is performed with a radical etch in which neutral ions are utilized. As such, substrate push is reduced.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Bo-Feng Young, Po-Chi Wu, Che-Cheng Chang
  • Patent number: 11777031
    Abstract: The present disclosure provides a semiconductor device and a method for fabricating a semiconductor device. The semiconductor device includes a substrate, a metal gate layer over the substrate, a channel between a source region and a drain region in the substrate, and a ferroelectric layer, at least a portion of the ferroelectric layer is between the metal gate layer and the substrate, wherein the ferroelectric layer includes hafnium oxide-based material, the hafnium oxide-based material includes a first portion of hafnium oxide with orthorhombic phase, a second portion of hafnium oxide with monoclinic phase, and a third portion of the hafnium oxide with tetragonal phase, wherein a first volume of the first portion is greater than a second volume of the second portion, and the second volume of the second portion is greater than a third volume the third portion.
    Type: Grant
    Filed: February 21, 2022
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun-Yen Peng, Chih-Yu Chang, Bo-Feng Young, Te-Yang Lai, Sai-Hooi Yeong, Chi On Chui
  • Publication number: 20230309315
    Abstract: A memory cell includes patterning a first trench extending through a first conductive line, depositing a memory film along sidewalls and a bottom surface of the first trench, depositing a channel layer over the memory film, the channel layer extending along the sidewalls and the bottom surface of the first trench, depositing a first dielectric layer over and contacting the channel layer to fill the first trench, patterning a first opening, wherein patterning the first opening comprises etching the first dielectric layer, depositing a gate dielectric layer in the first opening, and depositing a gate electrode over the gate dielectric layer and in the first opening, the gate electrode being surrounded by the gate dielectric layer.
    Type: Application
    Filed: June 1, 2023
    Publication date: September 28, 2023
    Inventors: Bo-Feng Young, Meng-Han Lin, Chih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin
  • Patent number: 11770934
    Abstract: A semiconductor structure includes a memory array, a staircase unit, conductive bridge structures, a word line driver and conductive routings. The memory array is disposed in an array region of the semiconductor structure and includes word lines. The staircase unit is disposed in a staircase region and surrounded by the array region. The staircase unit includes first and second staircase steps extending from the word lines of the memory array. The first staircase steps and the second staircase steps face towards each other. The conductive bridge structures are electrically connecting the first staircase steps to the second staircase step. The word line driver is disposed below the memory array and the staircase unit, wherein a central portion of the word line driver is overlapped with a central portion of the staircase unit. The conductive routings extend from the first and the second staircase steps to the word line driver.
    Type: Grant
    Filed: August 11, 2021
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Shih-Lien Linus Lu, Chia-En Huang, Yih Wang, Yu-Ming Lin
  • Publication number: 20230296202
    Abstract: A smoothly adjustable display screen bracket comprises: a first connecting seat, a connecting rod group and a second connecting seat, wherein the connecting rod group is arranged between the first connecting seat and the second connecting seat, the connecting rod group comprises a connecting rod, a force applying mechanism, a limiting sleeve, a cam member and a roller, and the roller is rotatably arranged on the second connecting seat, and one end of the force applying mechanism is connected with the first connecting seat, and the other end of the force applying mechanism is connected with the cam member, wherein a curved surface of the cam member is configured to press against the roller under the pushing action of the force applying mechanism. The limiting sleeve covers the outside of the force applying mechanism.
    Type: Application
    Filed: April 13, 2022
    Publication date: September 21, 2023
    Inventor: BO FENG
  • Patent number: 11764292
    Abstract: Circuit devices and methods of forming the same are provided. In one embodiment, a method includes receiving a workpiece that includes a substrate and a fin extending from the substrate, forming a first ferroelectric layer on the fin, forming a dummy gate structure over a channel region of the fin, forming a gate spacer over sidewalls of the dummy gate structure, forming an inter-level dielectric layer over the workpiece, removing the dummy gate structure to expose the first ferroelectric layer over the channel region of the fin, and forming a gate electrode over the exposed first ferroelectric layer over the channel region of the fin.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi On Chui, Chih-Hao Wang
  • Patent number: 11765892
    Abstract: In an embodiment, a method includes forming a multi-layer stack including alternating layers of an isolation material and a semiconductor material, patterning the multi-layer stack to form a first channel structure in a first region of the multi-layer stack, where the first channel structure includes the semiconductor material, depositing a memory film layer over the first channel structure, etching a first trench extending through a second region of the multi-layer stack to form a first dummy bit line and a first dummy source line in the second region, where the first dummy bit line and first dummy source line each include the semiconductor material, and replacing the semiconductor material of the first dummy bit line and the first dummy source line with a conductive material to form a first bit line and a first source line.
    Type: Grant
    Filed: October 21, 2020
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Chi On Chui, Chun-Chieh Lu, Yu-Ming Lin
  • Patent number: 11764281
    Abstract: Fin-like field effect transistors (FinFETs) and methods of fabrication thereof are disclosed herein. The FinFETs disclosed herein have gate air spacers integrated into their gate structures. An exemplary transistor includes a fin and a gate structure disposed over the fin between a first epitaxial source/drain feature and a second epitaxial source/drain feature. The gate structure includes a gate electrode, a gate dielectric, and gate air spacers disposed between the gate dielectric and sidewalls of the gate electrode.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chien-Ning Yao, Bo-Feng Young, Sai-Hooi Yeong, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11758736
    Abstract: A method of forming a semiconductor device includes: forming a first fin protruding above a substrate; forming first source/drain regions over the first fin; forming a first plurality of nanostructures over the first fin between the first source/drain regions; forming a first gate structure around the first plurality of nanostructures; and forming a first ferroelectric capacitor over and electrically coupled to the first gate structure.
    Type: Grant
    Filed: February 17, 2022
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Chi On Chui
  • Publication number: 20230268393
    Abstract: An embodiment is a semiconductor device including a first channel region over a semiconductor substrate, a second channel region over the first channel region, a first gate stack over the semiconductor substrate and surrounding the first channel region and the second channel region, a first inner spacer extending from the first channel region to the second channel region and along a sidewall of the first gate stack, a second inner spacer extending from the first channel region to the second channel region and along a sidewall of the first inner spacer, the second inner spacer having a different material composition than the first inner spacer, and a first source/drain region adjacent the first channel region, the second channel region, and the second inner spacer, the first and second inner spacers being between the first gate stack and the first source/drain region.
    Type: Application
    Filed: April 20, 2023
    Publication date: August 24, 2023
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Chi On Chui
  • Publication number: 20230260472
    Abstract: The present disclosure discloses an array substrate, a liquid crystal display panel, and a display apparatus, which relate to the field of display technologies. The array substrate includes a first base and a plurality of photosensitive devices disposed on the first base. The photosensitive device can recognize fingerprints. In this way, the screen-to-body ratio of a display apparatus manufactured by using the array substrate is effectively increased. When an orthographic projection of the photosensitive device in the array substrate onto the first base at least partially overlaps with a white sub-pixel region, a pixel aperture ratio of the array substrate can be increased, so that a display apparatus that is subsequently manufactured by using the array substrate has a relatively good display effect.
    Type: Application
    Filed: October 29, 2020
    Publication date: August 17, 2023
    Inventors: Xinlan YANG, Shijun WANG, Wenkai MU, Yi LIU, Bo FENG, Yang WANG, Zhan WEI, Tengfei DING, Jun FAN, Yuke TAI, Gongda CHEN, Guangshuang LV, Yingzi WANG
  • Patent number: 11729994
    Abstract: A ferroelectric device structure includes an array of ferroelectric capacitors overlying a substrate, first metal interconnect structures electrically connecting each of first electrodes of the array of ferroelectric capacitors to a first metal pad embedded in a dielectric material layer, and second metal interconnect structures electrically connecting each of the second electrodes of the array of ferroelectric capacitors to a second metal pad embedded in the dielectric material layer. The second metal pad may be vertically spaced from the substrate by a same vertical separation distance as the first metal pad is from the substrate. First metal lines laterally extending along a first horizontal direction may electrically connect the first electrodes to the first metal pad, and second metal lines laterally extending along the first horizontal direction may electrically connect each of the second electrodes to the second metal pad.
    Type: Grant
    Filed: October 8, 2021
    Date of Patent: August 15, 2023
    Inventors: Chenchen Jacob Wang, Yu-Ming Lin, Chi On Chui, Sai-Hooi Yeong, Bo-Feng Young
  • Patent number: 11729986
    Abstract: A ferroelectric memory device includes a multi-layer stack, a channel layer, a ferroelectric layer and oxygen scavenging layers. The multi-layer stack is disposed on a substrate and includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers. The ferroelectric layer is disposed between the channel layer and both of the plurality of conductive layers and the plurality of dielectric layers. The oxygen scavenging layers are disposed along sidewalls of the plurality of conductive layer. The plurality of oxygen scavenging layers laterally separate the ferroelectric layer from the plurality of conductive layers.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: August 15, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Chieh Lu, Sai-Hooi Yeong, Bo-Feng Young, Yu-Ming Lin, Chih-Yu Chang
  • Publication number: 20230252924
    Abstract: A display device is disclosed. The display device includes an array substrate and at least two driving units. The array substrate includes a peripheral region and a display region, the array substrate further includes a peripheral grounding line and a test line, wherein the peripheral grounding line is located in the peripheral region, and the test line is located in the peripheral region. The at least two driving units are located on at least one side of the array substrate, the driving unit includes at least two grounding pins, a grounding pin of at least one of the driving units is connected to the peripheral grounding line, and each of at least one grounding pin of one of two adjacent driving units is electrically connected to a corresponding grounding pin of the other adjacent driving unit.
    Type: Application
    Filed: April 19, 2023
    Publication date: August 10, 2023
    Inventors: Bingqing YANG, Wenkai MU, Haoliang JI, Bo FENG, Xiaoxiao CHEN, Tianxin ZHAO, Ji DONG, Zhiying BAO, Wenjun XIAO, Yang WANG, Shijun WANG, Hao XU
  • Patent number: 11717081
    Abstract: A smoothly adjustable artboard comprises: a base configured for fixing, an adjusting bracket configured to adjust the height and angle of the artboard, and a painting plate configured to place drawing paper, and the adjusting bracket is arranged between the base and the painting plate, wherein the adjusting bracket includes a connecting seat, a connecting bracket, a force applying mechanism, a cam member, a roller and a one-way limiting mechanism, the roller is rotatably arranged on the connecting bracket and is located at one end close to the base, and one end of the force applying mechanism is connected with the connecting seat, and the other end of the force applying mechanism is connected with the cam member, wherein a curved surface of the cam member is configured to press against the roller under the pushing action of the force applying mechanism.
    Type: Grant
    Filed: April 14, 2022
    Date of Patent: August 8, 2023
    Assignee: DongGuan KINGEASY Hardware Technology CO., LTD
    Inventor: Bo Feng
  • Patent number: 11716856
    Abstract: A memory cell includes patterning a first trench extending through a first conductive line, depositing a memory film along sidewalls and a bottom surface of the first trench, depositing a channel layer over the memory film, the channel layer extending along the sidewalls and the bottom surface of the first trench, depositing a first dielectric layer over and contacting the channel layer to fill the first trench, patterning a first opening, wherein patterning the first opening comprises etching the first dielectric layer, depositing a gate dielectric layer in the first opening, and depositing a gate electrode over the gate dielectric layer and in the first opening, the gate electrode being surrounded by the gate dielectric layer.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Feng Young, Meng-Han Lin, Chih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin
  • Publication number: 20230240066
    Abstract: Embodiments provide an integrated capacitor disposed directly over and aligned to a vertical gate all around memory cell transistor. In some embodiments, an air gap may be provided between adjacent word lines to provide a low k dielectric effect between word lines. In some embodiments, a bottom bitline structure may be split across multiple layers. In some embodiments, a second tier of vertical cells may be positioned over a first tier of vertical cells.
    Type: Application
    Filed: May 18, 2022
    Publication date: July 27, 2023
    Inventors: Sai-Hooi Yeong, Bo-Feng Young, Chi On Chui
  • Patent number: 11711024
    Abstract: The present disclosure provides a power module assembly and a converter. The power module assembly includes a power module and a capacitor module, and the power module and the capacitor module are configured to be detachably connected; the power module includes a first bus bar, and the first bus bar includes a first connection portion and a power installation portion connected to the first connection portion; the capacitor module includes a second bus bar, and the second bus bar includes a second connection portion and a capacitor installation portion connected to the second connection portion, wherein the first connection portion and the second connection portion extend along a first direction, and the power installation portion and the capacitor installation portion extend along a second direction; the first connection portion and the second connection portion are connected by a fastener.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: July 25, 2023
    Assignee: Delta Electronics (Shanghai) CO., LTD
    Inventors: Bo Feng, Jun Chen, Wei Huang, Shisheng Hou, Yansong Lu, Jingxian Kuang
  • Publication number: 20230230921
    Abstract: A semiconductor device includes a semiconductor substrate, first and second stack units disposed over the semiconductor substrate, and a feature disposed between the first and second stack units. Each of the first and second stack units includes at least one stack that includes a conductive film and a dielectric film stacked on each other. The feature includes a plurality of repeating units and a plurality of separators disposed to alternate with the repeating units. Each of the repeating units includes an inner portion including a pair of conductive pillars, and an outer portion including a memory film and a channel film. A method for manufacturing the semiconductor device is also disclosed.
    Type: Application
    Filed: January 18, 2022
    Publication date: July 20, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Han LIN, Bo-Feng YOUNG, Han-Jong CHIA, Sai-Hooi YEONG
  • Patent number: 11705519
    Abstract: A semiconductor device includes a Fin FET device. The Fin FET device includes a first fin structure extending in a first direction and protruding from an isolation insulating layer, a first gate stack including a first gate electrode layer and a first gate dielectric layer, covering a portion of the first fin structure and extending in a second direction perpendicular to the first direction, and a first source and a first drain, each including a first stressor layer disposed over the first fin structure. The first fin structure and the isolation insulating layer are disposed over a substrate. A height Ha of an interface between the first fin structure and the first stressor layer measured from the substrate is greater than a height Hb of a lowest height of the isolation insulating layer measured from the substrate.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: July 18, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Yen Yu, Che-Cheng Chang, Tung-Wen Cheng, Zhe-Hao Zhang, Bo-Feng Young