Patents by Inventor Bo-young SHIM

Bo-young SHIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of Fabricating Semiconductor Device and Method of Cleaning Processing Chamber in Semiconductor Device
    Publication number: 20170107616
    Abstract: Provided are a method of fabricating a semiconductor The method of fabricating a semiconductor device includes: transporting a substrate having a carbon-based sacrificial layer pattern to a processing chamber; forming a mask material layer on the substrate; removing the substrate from the processing chamber; and removing at least a part of a carbon-based material layer formed inside the processing chamber.
    Type: Application
    Filed: September 12, 2016
    Publication date: April 20, 2017
    Inventors: Bo-young SHIM, Eun-sung KIM, Chul-hwan CHOI, Chung-hwan KIM