Patents by Inventor Bob Tseng

Bob Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for improving process control for semiconductor manufacturing operations
    Patent number: 7010382
    Abstract: A method and system are disclosed for configuring manufacturing tools in a semiconductor manufacturing flow. After collecting information with regard to one or more product performance features associated with a processing step performed in a process tool, one or more undesired process tool performance excursion patterns may be determined based on the collected information. On the other hand, operational and processing parameters of the process tool are monitored while conducting the processing step. Non-conformance faults of the monitored operational and processing conditions are detected and classified. A correlation between the classified non-conformance faults with the determined excursion patterns is made for adjusting one or more processing parameters of the processing tool.
    Type: Grant
    Filed: February 26, 2004
    Date of Patent: March 7, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chang Yung Cheng, Bob Tseng
  • Method and system for improving process control for semiconductor manufacturing operations
    Publication number: 20050192698
    Abstract: A method and system are disclosed for configuring manufacturing tools in a semiconductor manufacturing flow. After collecting information with regard to one or more product performance features associated with a processing step performed in a process tool, one or more undesired process tool performance excursion patterns may be determined based on the collected information. On the other hand, operational and processing parameters of the process tool are monitored while conducting the processing step. Non-conformance faults of the monitored operational and processing conditions are detected and classified. A correlation between the classified non-conformance faults with the determined excursion patterns is made for adjusting one or more processing parameters of the processing tool.
    Type: Application
    Filed: February 26, 2004
    Publication date: September 1, 2005
    Inventors: Chang Yung Cheng, Bob Tseng