Patents by Inventor Bobby Ronsse

Bobby Ronsse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for the deposition of high dielectric constant films
    Publication number: 20060196421
    Abstract: An integrated deposition system is described that is capable of vaporizing low vapor pressure liquid precursors and conveying the vapor to a processing region to fabricate advanced integrated circuits. The integrated deposition system includes a heated exhaust system, a remote plasma generator, a processing chamber, a liquid delivery system, and a computer control module that together create a commercially viable and production worthy system for depositing high capacity dielectric materials from low vapor pressure precursors.
    Type: Application
    Filed: February 17, 2006
    Publication date: September 7, 2006
    Inventors: Bobby Ronsse, Craig Metzner, Richard Collins