Patents by Inventor Brad Halleck

Brad Halleck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REACTION CHAMBER
    Publication number: 20100116207
    Abstract: A reaction chamber having a reaction spaced defined therein, wherein the reaction space is tunable to produce substantially stable and laminar flow of gases through the reaction space. The substantially stable and laminar flow is configured to improve the uniformity of deposition on substrates being processed within the reaction chamber to provide a predictable deposition profile.
    Type: Application
    Filed: November 5, 2009
    Publication date: May 13, 2010
    Applicant: ASM AMERICA, INC.
    Inventors: Michael Givens, Matthew Goodman, Mark Hawkins, Brad Halleck, Herbert Terhorst