Patents by Inventor Brain K. Hatcher

Brain K. Hatcher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA REACTOR WITH CENTER-FED MULTIPLE ZONE GAS DISTRIBUTION FOR IMPROVED UNIFORMITY OF CRITICAL DIMENSION BIAS
    Publication number: 20090272492
    Abstract: A gas distribution assembly for the ceiling of a plasma reactor includes a center fed hub and an equal path length distribution gas manifold underlying the center fed hub.
    Type: Application
    Filed: June 20, 2008
    Publication date: November 5, 2009
    Applicant: Applied Materials, Inc.
    Inventors: Dan Katz, David Palagashvili, Brain K. Hatcher, Theodoros Panagopoulos, Valentin N. Todorow, Edward P. Hammond, IV, Alexander M. Paterson, Rodolfo P. Belen