Abstract: Systems and methods are disclosed that provide a support system in the Z direction for patterning devices that can function under high acceleration and deceleration with minimal effect on travel and hysteresis in the X and Y directions. A reticle clamping system includes a support device and a holding device. The holding device is configured to releasably couple a reticle to the support device. The holding device includes a plurality of burls. The reticle clamping system further includes a metallic support system coupled to the support device. The metallic support system provides a vacuum path from a vacuum channel to the holding device.

Abstract: Systems and methods are disclosed that provide a support system in the Z direction for patterning devices that can function under high acceleration and deceleration with minimal effect on travel and hysteresis in the X and Y directions. A reticle clamping system includes a support device and a holding device. The holding device is configured to releasably couple a reticle to the support device. The holding device includes a plurality of burls. The reticle clamping system further includes a metallic support system coupled to the support device. The metallic support system provides a vacuum path from a vacuum channel to the holding device.

Abstract: The exchange-driven electronic market system disclosed herein allows increasing volume and efficiency of transactions between buyers and sellers in a marketplace. An implementation of the electronic market system includes a method comprising receiving a plurality of sale offers, each sale offer including required revenue values required volume values for a product, determining an offered market price based on the plurality of sale offers, displaying the offered market price to a plurality of buyers, receiving from the plurality of buyers a plurality of conditional offers for purchases (COPs), and completing a plurality of sales transactions, if the combination of one or more of the plurality of COPs meets the combination of one or more of the required revenue values.