Abstract: A composite assembly of a relatively inexpensive ceramic, such as alumina, with a skin, or covering, of a high wear ceramic, such as sapphire, adapted to be used in semiconductor processing environments subjected to high levels of corrosion and/or erosion. The design life of the composite assembly may be significantly longer than previously used components. The composite assembly may have its ceramic pieces joined together with aluminum, such that the joint is not vulnerable to corrosive aspects to which the composite assembly may be exposed.

Abstract: A composite assembly of a relatively inexpensive ceramic, such as alumina, with a skin, or covering, of a high wear ceramic, such as sapphire, adapted to be used in industrial environments subjected to high levels of corrosion and/or erosion. The design life of the composite assembly may be significantly longer than previously used components. The composite assembly may have its ceramic pieces joined together with aluminum, such that the joint is not vulnerable to corrosive aspects to which the composite assembly may be exposed.

Abstract: A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

Abstract: A method for the repair of a heater, or an electrostatic chuck, using a ceramic top layer joined with a hermetically sealed joint. The heater or electrostatic chuck may be machined down to remove a damaged top surface, and to allow for the joining of a new top surface. The new top pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

Abstract: A method for the repair of a heater, or an electrostatic chuck, using a ceramic top layer joined with a hermetically sealed joint. The heater or electrostatic chuck may be machined down to remove a damaged top surface, and to allow for the joining of a new top surface. The new top pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

Abstract: A system for electrokinetic desalinization of soil may include at least one cathode including a hollow cathode tube perforated along its length to allow liquid water to pass through the cathode tube from an exterior thereof to an interior thereof, and a cathode conductor extending along an exterior surface of the cathode tube; at least one anode including a hollow anode tube perforated along its length to allow liquid water to pass through the anode tube from an exterior thereof to an interior thereof, and an anode conductor extending along an exterior surface of the anode tube; a make-up water line communicating with the interior of the anode tube; an anode discharge line communicating with the interior of the anode tube; and a cathode discharge line communicating with the interior of the cathode tube.

Abstract: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with a silicon and an alloying element under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck.

Abstract: A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with a high purity silicon or a silicon alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck.

Abstract: A system for electrokinetic desalinization of soil may include at least one cathode including a hollow cathode tube perforated along its length to allow liquid water to pass through the cathode tube from an exterior thereof to an interior thereof, and a cathode conductor extending along an exterior surface of the cathode tube; at least one anode including a hollow anode tube perforated along its length to allow liquid water to pass through the anode tube from an exterior thereof to an interior thereof, and an anode conductor extending along an exterior surface of the anode tube; a make-up water line communicating with the interior of the anode tube; an anode discharge line communicating with the interior of the anode tube; and a cathode discharge line communicating with the interior of the cathode tube.

Abstract: An electromagnet component assembly includes a preformed conductive winding formed in at least first and second pieces for assembly with a single magnetic core with a simplified and relatively low cost manufacture. The assembly provides a power inductor operable at higher current, higher power levels with reduced direct current resistance.

Abstract: An electrostatic chuck with dielectric inserts provides conveyance of cooling gas while eliminating arc path to a workpiece surface. The electrostatic chuck includes the workpiece surface configured to support a substrate such as a semiconductor wafer, a plenum configured to carry a cooling gas, and a plurality of dielectric inserts configured to provide communication of the cooling gas between the plenum and the workpiece surface. The dielectric inserts may comprise a passage to provide the communication of the cooling gas. The dielectric inserts may be further configured to prevent line-of-sight between the workpiece surface of the electrostatic chuck and a conducting surface within the electrostatic chuck.

Abstract: A susceptor for high temperature semiconductor processing is provided. The susceptor includes a substrate support joined to a hollow shaft having a pair of ports to allow an inert gas to be purged through an internal volume of the shaft. Some embodiments of the susceptor include a chamber mount to support the shaft within a processing chamber and a chamber mount insert disposed within the chamber mount. In these embodiments the chamber mount insert includes the ports. The chamber mount insert can also include a thermocouple tube with a fitting to seal around the thermocouple and to impart an upward pressure to the thermocouple to keep the thermocouple properly seated within the substrate support. The chamber mount insert can also include electrical connectors with glass-to-metal seals.

Abstract: Susceptors are provided that employ layers of CTE-matching materials to reduce the stresses that otherwise lead to cracking and failure. Exemplary CTE-matching materials include metal alloys of aluminum and silicon that can be tailored to specific CTE values by adjusting the ratio of the elements. An exemplary susceptor comprises a CTE-matching material that accommodates the differences in the CTEs of a ceramic material and a thermal barrier layer disposed on opposite sides of the CTE-matching material. Methods are also provided for forming susceptors. These methods comprise assembling the components and bonding the assembly together, such as by diffusion bonding, to produce a susceptor that is a monolithic body.

Abstract: A susceptor including a substrate support and a conductor is provided. The substrate support includes a conductive element, a contact bonded to the conductive element, and a bushing. The conductor is disposed through the bushing and is bonded to the contact. The substrate support can also include a conductive spreader between the contact and the conductive element. A method for fabricating a susceptor is also provided. The method comprises forming a plate including a bushing preform, sintering or hot-pressing a conductive element and a contact between a ceramic layer and the plate to produce a substrate support, forming a conductor opening into the substrate support and through the bushing preform to the contact, and bonding a conductor into the conductor opening.

Abstract: The present invention satisfies this and other needs by providing a novel wafer heater, which isolates a heater element from the vacuum environment. Thus, a non-aluminum heater element can be used in a wafer heater of the current invention. The novel wafer heater of the invention has an interface with high vacuum integrity, minimal dead space and reduced potential for vacuum contamination.

Abstract: In a shooting range for training personnel in the use of firearms, a bullet trap that prevents rebounding bullets or flying debris from injuring shooters, has a central section of stacked cylindrical logs, or logs having a trapezoidal cross section, supported by stacked rectangular supporting blocks on each side. The stacked cylindrical logs have conical end sections at the end facing the shooter. These conical end sections direct incoming bullets to passageways between the cylindrical logs. Bullets passing through these passageways then strike a backstop panel. In a preferred embodiment, both the cylindrical logs and the backstop panel are made of shock-absorbing foamed fiber-reinforced concrete.

Abstract: In a shooting range for training personnel in the use of firearms, a bullet trap that prevents rebounding bullets or flying debris from injuring shooters, has a central section of stacked cylindrical logs, or logs having a trapezoidal cross section, supported by stacked rectangular supporting blocks on each side. The stacked cylindrical logs have conical end sections at the end facing the shooter. These conical end sections direct incoming bullets to passageways between the cylindrical logs. Bullets passing through these passageways then strike a backstop panel. In a preferred embodiment, both the cylindrical logs and the backstop panel are made of shock-absorbing foamed fiber-reinforced concrete.