Patents by Inventor Brian G. Prevo

Brian G. Prevo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METAL OXIDE-POLYMER COMPOSITE PARTICLES FOR CHEMICAL MECHANICAL PLANARIZATION
    Publication number: 20160319160
    Abstract: CMP processes, tools and slurries utilize metal oxide-polymer composite particles that include metal oxide particles and a polymer core. The metal oxide particles are modified with a modifying agent and are partially or fully embedded within the polymer core. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.
    Type: Application
    Filed: December 16, 2014
    Publication date: November 3, 2016
    Inventors: Brian G. Prevo, Mark J. Hampden-Smith, Dmitry Fomitchev, Yakov E. Kutsovsky
  • Chemical Mechanical Planarization Slurry Composition Comprising Composite Particles, Process for Removing Material Using Said Composition, CMP Polishing Pad and Process for Preparing Said Composition
    Publication number: 20160090513
    Abstract: CMP processes, tools and slurries utilize composite particles that include core particles having organosilica particles disposed about the core particles. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.
    Type: Application
    Filed: April 30, 2014
    Publication date: March 31, 2016
    Inventors: Qingling Zhang, Bennett Greenwood, Ravi Sharma, Geoffrey D. Moeser, Brian G. Prevo, Mark J. Hampden-Smith
  • Coating comprising multipopulation fumed silica particles
    Patent number: 8853317
    Abstract: The invention provides a coating comprising fumed silica particles, wherein the fumed silica particles comprise aggregates of primary particles, wherein (a) the primary particles have a bimodal or multimodal particle size distribution representing populations of particles having at least a smallest average primary particle size and a largest average primary particle size, and wherein primary particles having a smaller average primary particle size are attached to primary particles having a larger average primary particle size, or (b) the aggregates have a bi-modal or multi-modal aggregate size distribution, and a carrier. The invention additionally provides a method for preparing a coated article comprising the coating.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: October 7, 2014
    Assignee: Cabot Corporation
    Inventors: Angelica M. Sanchez Garcia, Brian G. Prevo, Joseph B. Carroll
  • COATING COMPRISING MULTIPOPULATION FUMED SILICA PARTICLES
    Publication number: 20120142837
    Abstract: The invention provides a coating comprising fumed silica particles, wherein the fumed silica particles comprise aggregates of primary particles, wherein (a) the primary particles have a bimodal or multimodal particle size distribution representing populations of particles having at least a smallest average primary particle size and a largest average primary particle size, and wherein primary particles having a smaller average primary particle size are attached to primary particles having a larger average primary particle size, or (b) the aggregates have a bi-modal or multi-modal aggregate size distribution, and a carrier. The invention additionally provides a method for preparing a coated article comprising the coating.
    Type: Application
    Filed: February 28, 2011
    Publication date: June 7, 2012
    Applicant: CABOT CORPORATION
    Inventors: Angelica M. Sanchez Garcia, Brian G. Prevo, Joseph B. Carroll