Abstract: Organometallic radiation resist compositions are described based on tin ions with alkyl ligands. Some of the compositions have branched alkyl ligands to provide for improved patterning contrast while maintaining a high degree of solution stability. Blends of compounds with distinct alkyl ligands can provide further improvement in the patterning. High resolution patterning with a half-pitch of no more than 25 nm can be achieved with a line width roughness of no more than about 4.5 nm. Synthesis techniques have been developed that allow for the formation of alkyl tin oxide hydroxide compositions with very low metal contamination.

Abstract: Precursor solutions for radiation patternable coatings are formed with an organic solvent and monoalkyl tin trialkoxides in which the water content of the solvent is adjusted to be within 10 percent of a selected value. Generally, the water content of the solvent is adjusted through water addition, although water removal can also be used. In some embodiments, the adjusted water content of the solvent can be from about 250 ppm by weight to about 10,000 ppm by weight. With the appropriate selection of ligands, the adjusted precursor solutions can be stable for at least about 42 days, and in some cases at least 8 months.

Abstract: A method for patterning a radiation sensitive material on a substrate involves the development of a material on a substrate based on a latent image in the material with irradiated regions and non-irradiated regions to form a physically patterned material on the substrate, in which the material comprises an organotin radiation sensitive patterning material and an additive. The additive is a photoacid generator, a quencher or a mixture thereof. Patterning improvements can be achieved using a series of a baking and development step followed by a second baking at a higher temperature and a second development step following the second baking step. A precursor solution for forming an organometallic radiation patterning material can comprise an organic solvent, a dissolved organotin composition having C—Sn bonds that can cleave in response to EUV radiation, and a quencher. The additive can comprise an onium cation.

Abstract: A deck system includes plural deck units fastened together and carried directly by the framing system of a building directly or indirectly by frame elements that are themselves carried by the framing system. To relieve lateral forces on the deck system that exceed a pre-engineered level, these frame elements include a slidable support and slidable brackets both with slotted holes that permit controlled and limited movement of the deck system in two mutually orthogonal directions with respect to the framing system of the building. In addition, the individual deck units may move horizontally with respect to the each other and the framing system. Each decking unit may be connected to an adjacent decking unit using a slotted hole formed in one of its two side laps.

Abstract: A truss structure well suited for use as an engine strut on a commercial aircraft. The truss structure is cast as a single piece integrally formed component from a titanium alloy or another suitably lightweight, structurally strong material. The truss structure includes a plurality of integrally formed attachment structures which enable the truss structure to be secured to an element of an aircraft such as a wing. A plurality of attachment areas for an element such as an engine is also formed that allows the element (e.g. jet engine) to be secured to the truss structure. The truss structure includes a plurality of elongated rails and truss elements that are arranged to provide redundant load paths to ensure that a failure of any one truss element or elongated rail will not result in a failure of the overall truss structure to support whatever load is required.

Abstract: A truss structure well suited for use as an engine strut on a commercial aircraft. The truss structure is cast as a single piece integrally formed component from a titanium alloy or another suitably lightweight, structurally strong material. The truss structure includes a plurality of integrally formed attachment structures which enable the truss structure to be secured to an element of an aircraft such as a wing. A plurality of attachment areas for an element such as an engine is also formed that allows the element (e.g. jet engine) to be secured to the truss structure. The truss structure includes a plurality of elongated rails and truss elements that are arranged to provide redundant load paths to ensure that a failure of any one truss element or elongated rail will not result in a failure of the overall truss structure to support whatever load is required.