Abstract: A chemical mechanical polishing apparatus has a platen to support a polishing pad, the platen having a recess, a carrier head to hold a surface of a substrate against the polishing pad and comprising a retaining ring to retain the substrate below the carrier head, a motor to generate relative motion between the platen and the carrier head so as to polish the substrate, an in-situ acoustic monitoring system comprising an acoustic sensor arranged in the recess that receives acoustic energy from friction between the substrate and the polishing pad and from friction between the retaining ring and the polishing pad, and a controller configured to generate a value for a carrier head status parameter based on received acoustic signals from the in-situ acoustic monitoring system, and change or polishing parameter or generate an alert based on the carrier head status parameter.

Abstract: A chemical mechanical polishing apparatus has a platen to support a polishing pad, a carrier head comprising a rigid housing and configured to hold a surface of a substrate against the polishing pad, a motor to generate relative motion between the platen and the carrier head so as to polish the substrate, an in-situ carrier head monitoring system including a sensor positioned to interact with the housing and to detect vibrational motion of the housing and generate signals based on the detected vibrational motion, and a controller. The controller is configured to generate a value for a carrier head status parameter based on received signals from the in-situ carrier head monitoring system, and change a polishing parameter or generate an alert based on the carrier head status parameter.

Abstract: A collaborative content management system is disclosed herein for receiving a command to add an annotation object following a character input into a line of a collaborative content item. The system inserts an annotation object onto the line following the character, detects a selection of the annotation object, and displays a secondary collaborative content item in visual association with the character. The system detects textual content that corresponds to a citation within the secondary collaborative content item, and responsive to detecting the textual content, generates for display a template for inputting fields of a citation. The system receives text entered into one or more of the fields, generates a citation based on the text, and inputs the citation into the secondary collaborative content item.

Abstract: A collaborative content management system is disclosed herein for receiving a command to add an annotation object following a character input into a line of a collaborative content item. The system inserts an annotation object onto the line following the character, detects a selection of the annotation object, and displays a secondary collaborative content item in visual association with the character. The system detects textual content that corresponds to a citation within the secondary collaborative content item, and responsive to detecting the textual content, generates for display a template for inputting fields of a citation. The system receives text entered into one or more of the fields, generates a citation based on the text, and inputs the citation into the secondary collaborative content item.

Abstract: A collaborative content management system is disclosed herein for receiving a command to add an annotation object following a character input into a line of a collaborative content item. The system inserts an annotation object onto the line following the character, detects a selection of the annotation object, and displays a secondary collaborative content item in visual association with the character. The system detects textual content that corresponds to a citation within the secondary collaborative content item, and responsive to detecting the textual content, generates for display a template for inputting fields of a citation. The system receives text entered into one or more of the fields, generates a citation based on the text, and inputs the citation into the secondary collaborative content item.

Abstract: A collaborative content management system is disclosed herein for receiving a command to add an annotation object following a character input into a line of a collaborative content item. The system inserts an annotation object onto the line following the character, detects a selection of the annotation object, and displays a secondary collaborative content item in visual association with the character. The system detects textual content that corresponds to a citation within the secondary collaborative content item, and responsive to detecting the textual content, generates for display a template for inputting fields of a citation. The system receives text entered into one or more of the fields, generates a citation based on the text, and inputs the citation into the secondary collaborative content item.