Patents by Inventor Bruce A. Hadwiger

Bruce A. Hadwiger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multiple wavelength ellipsometer system and related method
    Patent number: 9354118
    Abstract: A multiple wavelength ellipsometer system for use in thin film characterization is disclosed. The light source for the system may include sequentially scanned multiple light emitting diodes or laser diodes. The polarization state detector may comprise no moving parts, and utilizes economical uncoated glass plates as beam splitters. The system compensates for potential measurement errors induced by misalignment of the input beam angle to the polarization state detector via a paired arrangement of the beam splitters. To provide improved accuracy in the analysis of data acquired by the system, methods herein actively compensate for the relatively large bandwidth of a preferable light emitting diode source.
    Type: Grant
    Filed: February 6, 2014
    Date of Patent: May 31, 2016
    Assignee: Film Sense, LLC
    Inventors: Blaine D. Johs, Bruce A. Hadwiger
  • Multiple Wavelength Ellipsometer System and Related Method
    Publication number: 20150219497
    Abstract: A multiple wavelength ellipsometer system for use in thin film characterization is disclosed. The light source for the system may include sequentially scanned multiple light emitting diodes or laser diodes. The polarization state detector may comprise no moving parts, and utilizes economical uncoated glass plates as beam splitters. The system compensates for potential measurement errors induced by misalignment of the input beam angle to the polarization state detector via a paired arrangement of the beam splitters. To provide improved accuracy in the analysis of data acquired by the system, methods herein actively compensate for the relatively large bandwidth of a preferable light emitting diode source.
    Type: Application
    Filed: February 6, 2014
    Publication date: August 6, 2015
    Applicant: Film Sense, LLC
    Inventors: Blaine D. Johs, Bruce A. Hadwiger