Patents by Inventor Bruce H. Satterlund

Bruce H. Satterlund has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stress isolated MEMS structures and methods of manufacture
    Patent number: 9010190
    Abstract: A MEMS pressure sensor may be manufactured to include a backing substrate having a diaphragm backing portion and a pedestal portion. A diaphragm substrate may be manufactured to include a pedestal portion and a diaphragm that is mounted to the diaphragm backing portion of the backing substrate to form a stress isolated MEMS die. The pedestal portions of the backing and diaphragm substrates form a pedestal of the stress isolated MEMS die. The pedestal is configured for isolating the diaphragm from stresses including packaging and mounting stress imparted on the stress isolated MEMS die.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: April 21, 2015
    Assignee: Rosemount Aerospace Inc.
    Inventors: David P. Potasek, John C. Christenson, Bruce H. Satterlund, Randy Phillips, Dave Holmquist
  • STRESS ISOLATED MEMS STRUCTURES AND METHODS OF MANUFACTURE
    Publication number: 20130276544
    Abstract: A MEMS pressure sensor may be manufactured to include a backing substrate having a diaphragm backing portion and a pedestal portion. A diaphragm substrate may be manufactured to include a pedestal portion and a diaphragm that is mounted to the diaphragm backing portion of the backing substrate to form a stress isolated MEMS die. The pedestal portions of the backing and diaphragm substrates form a pedestal of the stress isolated MEMS die. The pedestal is configured for isolating the diaphragm from stresses including packaging and mounting stress imparted on the stress isolated MEMS die.
    Type: Application
    Filed: April 20, 2012
    Publication date: October 24, 2013
    Applicant: Rosemount Aerospace Inc.
    Inventors: David P. Potasek, John C. Christenson, Bruce H. Satterlund, Randy Phillips, Dave Holmquist