Abstract: A method of manufacturing substrates using a transport and handing-over arrangement for disc shaped substrates, including a carrier and a take-over arrangement. A substrate carrier of magnetisable material has a peripheral protruding rim. An untreated substrate lies in the substrate carrier below the rim. The substrate carrier is taken-over from the take-over arrangement by controlling a distance between a permanent magnet and the substrate carrier and transported from to a treatment station. The controlled drive of the permanent magnets in the take-over arrangement is performed by means of pneumatic piston/cylinder arrangements.

Abstract: Liquid precursor material of a coating substance and a solvent is provided in a reservoir (STEP1, STEP1?). In one variant the liquid precursor material is distilled (STEP2), the resultant liquid coating substance is vaporized (STEP3) and ejected through a vapor distribution nozzle arrangement (7) into a vacuum recipient (3) and onto substrate 5 to be coated. Alternatively, the liquid precursor material is directly vaporized (STEP3?). From the two-component vapor coating substance vapor is applied to substrate 5? to be coated. In this variant separation of solvent vapor and coating substance vapor is performed especially downstream vaporizing (STEP2?).

Abstract: A method of manufacturing substrates using a transport and handing-over arrangement for disc shaped substrates, including a carrier and a take-over arrangement. A substrate carrier of magnetisable material has a peripheral protruding rim. An untreated substrate lies in the substrate carrier below the rim. The substrate carrier is taken-over from the take-over arrangement by controlling a distance between a permanent magnet and the substrate carrier and transported from to a treatment station. The controlled drive of the permanent magnets in the take-over arrangement is performed by means of pneumatic piston/cylinder arrangements.

Abstract: A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetizable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).

Abstract: Liquid precursor material of a coating substance and a solvent is provided in a reservoir (STEP1, STEP1?). In one variant the liquid precursor material is distilled (STEP2), the resultant liquid coating substance is vaporized (STEP3) and ejected through a vapor distribution nozzle arrangement (7) into a vacuum recipient (3) and onto substrate 5 to be coated. Alternatively, the liquid precursor material is directly vaporized (STEP3?). From the two-component vapor coating substance vapor is applied to substrate 5? to be coated. In this variant separation of solvent vapor and coating substance vapor is performed especially downstream vaporizing (STEP2?).

Abstract: Liquid precursor material of a coating substance and a solvent is provided in a reservoir (STEP1, STEP1?). In one variant the liquid precursor material is distilled (STEP2), the resultant liquid coating substance is vaporized (STEP3) and ejected through a vapour distribution nozzle arrangement (7) into a vacuum recipient (3) and onto substrate 5 to be coated. Alternatively, the liquid precursor material is directly vaporized (STEP3?). From the two-component vapour coating substance vapour is applied to substrate 5? to be coated. In this variant separation of solvent vapour and coating substance vapour is performed especially downstream vaporizing (STEP2?).

Abstract: A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).