Abstract: An optical arrangement includes several separate individual beams that pass through a common focus before a first segmented mirror field and, after reflection by respective separate mirrors of the segmented mirror field, the individual beams are imaged by an objective on one or more workpieces. A second segmented mirror field is arranged between the first segmented mirror field and the object, or at least one beam splitter is arranged after the focus and deflects the individual beams onto at least one segmented mirror field, by which they are reflected back at least nearly identically on themselves.

Abstract: The invention relates to a process for providing a bearing of a tilting device, which makes possible a tilt around at least one axis, with a tilting member, a base member, and a bearing situated between these two members. The center of gravity of the tilting member is situated at the pivot point of the bearing. A first portion of the tilting member is arranged above the pivot point, a second portion of the tilting member is arranged below the pivot point, and the weight of the first portion of the tilting member and the weight of the second portion of the tilting member correspond to each other.

Abstract: The stage plate of a sample carrying stage for optical instruments has a piezoelectric translator that drives the stage plate centrally and directly, and a linear guide comprising at least two elastic elements to guide the stage plate. The elastic elements are arranged coaxially to the piezoelectric translator, which extends through a central recess in the elastic elements.