Abstract: Disclosed herein is a load lock to be on standby after loading a plurality of substrates in cooperation with a transfer means adapted to transfer the substrates from process chambers in turn. The present invention provides the load lock which increases the transfer rate thereof to efficiently transfer the substrates to the process chambers or the exterior, and a load lock chamber using the load lock. According to the present invention, the load lock includes a plurality of substrate support panels which support the substrates thereon, are movable vertically, and are spaced apart from each other by a distance that is greater than the thickness of the substrate, and drive units for vertically moving at least one of the substrate support panels.