Abstract: The AC drive type electroluminescent display device comprises a combination of an electroluminescent element, a transistor for driving the electroluminescent element, a source of alternating current, a switching transistor ON/OFF--controlling the first mentioned transistor, and a capacitor. The transistor for driving the electroluminescent element comprises a channel region of a first conductivity type and made of polycrystalline silicon with its grain size increased, first and second impurity diffused layers on the opposite sides of the channel region and a gate electrode overlying a predetermined portion of the channel region via a gate insulating film. The gate electrode is made of polycrystalline silicon diffused with an impurity of a second conductivity type. Offset gate regions are formed between the gate electrode and the first and second impurity diffused layers respectively.

Abstract: A pattern to be examined is scanned to produce binary information of divisional regions of the pattern corresponding to the picture elements of respective scanning lines as parallel information. The parallel information regarding the shape and position of the pattern is concurrently examined under two modes. The second mode includes examination of the vertical edge and the horizontal edge, examination of the vertical and horizontal edges by compensating the deviation of mask setting in the horizontal direction, and examination of the vertical and horizontal edges by compensating the deviation of mask setting in the vertical direction.