Abstract: The present invention relates to an apparatus and method of Chemical Mechanical Planarization ("CMP") for wafer, flat panel display (FPD), and hard drive disk (HDD). The preferred apparatus comprises a looped belt spatially oriented in a vertical direction with respect to a ground floor. A polishing pad is glued to an outer surface of the belt. At an inner surface of the belt, there are a plurality of wafer supports to support the wafers while they are in polishing process. Wafers are loaded from a wafer station to a wafer head using a handling structure before polishing and are unloaded from the wafer head to the wafer station after polishing. An electric motor or equivalent is used to drive the looped belt running over two pulleys. An adjustment means is used to adjust the tension and position of the belt for smooth running. This new CMP machine can be mounted in multiple orientations to save manufacturing space.

Abstract: The present invention relates to an apparatus and method of Chemical Mechanical Planarization ("CMP") for wafer, flat panel display (FPD), and hard drive disk (HDD). The preferred apparatus comprises a looped belt spatially oriented in a vertical direction with respect to a ground floor. A polishing pad is glued to an outer surface of the belt. At an inner surface of the belt, there are a plurality of wafer supports to support the wafers while they are in polishing process. Wafers are loaded from a wafer station to a wafer head using a handling structure before polishing and are unloaded from the wafer head to the wafer station after polishing. An electric motor or equivalent is used to drive the looped belt running over two pulleys. An adjustment means is used to adjust the tension and position of the belt for smooth running. This new CMP machine can be mounted in multiple orientations to save manufacturing space.

Abstract: An apparatus is disclosed for actuating the read-write heads of a disk file in which a plurality of support rails having resilient bushings at either end support on their central portions a carriage for the read-write heads and on their resilient bushings the support structure for the magnets which drive the carriage during operation. Reaction forces arising in the magnets are thereby isolated from the support rails and the frame.

Abstract: A rotary turntable has an upward step and a peripheral rim divided into pockets by upstanding radial walls. Objects deposited at random near the center of the turntable move by centrifugal force and some gravitional pull toward the step. They are individually separated by vertically reciprocating radial walls and are lifted up to the step and to the rim by lifters vertically reciprocating in time with the radial walls as the turntable revolves. A peripheral wall or band engages the outer ends of the partitions to retain objects in the pockets except for a small part of the periphery through which the pocketed objects are singly discharged.