Abstract: A processing chamber may include a gas distribution member, a metal ring member below the gas distribution member, and an isolating assembly coupled with the metal ring member and isolating the metal ring member from the gas distribution member. The isolating assembly may include an outer isolating member coupled with the metal ring member. The outer isolating member may at least in part define a chamber wall. The isolating assembly may further include an inner isolating member coupled with the outer isolating member. The inner isolating member may be disposed radially inward from the metal ring member about an central axis of the processing chamber. The inner isolating member may define a plurality of openings configured to provide fluid access into a radial gap between the metal ring member and the inner isolating member.

Abstract: A method of forming a radio frequency (RF) strap for use in a process chamber is provided. The method includes positioning a core strap including a first material that is electrically and thermally conductive in a first electrochemical bath. The first electrochemical bath includes a first solvent and a first plating precursor. The method further includes forming a first protective coating on an outer surface of the core strap, removing the first solvent and the first plating precursor from the core strap having the first protective coating formed thereon, post-treating the core strap having the first protective coating formed thereon, positioning the core strap having the first protective coating formed thereon in a second electrochemical bath, and forming a second protective coating on an outer surface of the first protective coating.

Abstract: In one or more embodiments, a method for depositing a carbon hard-mask material by plasma-enhanced chemical vapor deposition (PECVD) includes heating a substrate contained within a process chamber to a temperature in a range from about 100 C to about 700 C and producing a plasma with a power generator emitting an RF power of greater than 3 kW. In some examples, the temperature is in a range from about 300C to about 700C and the RF power is greater than 3 kW to about 7 kW. The method also includes flowing a hydrocarbon precursor into the plasma within the process chamber and forming a carbon hard-mask layer on the substrate at a rate of greater than 5,000/min, such as up to about 10,000/min or faster.

Abstract: A processing chamber may include a gas distribution member, a metal ring member below the gas distribution member, and an isolating assembly coupled with the metal ring member and isolating the metal ring member from the gas distribution member. The isolating assembly may include an outer isolating member coupled with the metal ring member. The outer isolating member may at least in part define a chamber wall. The isolating assembly may further include an inner isolating member coupled with the outer isolating member. The inner isolating member may be disposed radially inward from the metal ring member about an central axis of the processing chamber. The inner isolating member may define a plurality of openings configured to provide fluid access into a radial gap between the metal ring member and the inner isolating member.

Abstract: A method of forming a radio frequency (RF) strap for use in a process chamber is provided. The method includes positioning a core strap including a first material that is electrically and thermally conductive in a first electrochemical bath. The first electrochemical bath includes a first solvent and a first plating precursor. The method further includes forming a first protective coating on an outer surface of the core strap, removing the first solvent and the first plating precursor from the core strap having the first protective coating formed thereon, post-treating the core strap having the first protective coating formed thereon, positioning the core strap having the first protective coating formed thereon in a second electrochemical bath, and forming a second protective coating on an outer surface of the first protective coating.

Abstract: A glass forming apparatus and method include a cooling mechanism in a wall of the apparatus that enhances radiation heat transfer between the glass and the wall of the apparatus and is tunable in both the vertical and horizontal directions. The apparatus and method also include a heating mechanism that affects radiation heat transfer between the glass and the wall of the apparatus, is tunable in both the vertical and horizontal directions, and is independently operable from the cooling mechanism.

Abstract: A method of making a shaped glass article includes placing a glass sheet on top of a mold. A heat exchanger is arranged relative to the mold such that a heat exchange surface of the heat exchanger is in opposing relation to a back surface of the mold and separated from the back surface of the mold by a gap containing a layer of gas. The height of the gap is selected such that the dominant heat transfer between the heat exchange surface and the back surface of the mold is by conduction through the layer of gas. The glass sheet is heated and formed into a shaped glass article with the mold. The heat exchanger is operated to remove heat from at least part of the mold during at least one of heating the glass sheet, forming the shaped glass article, and cooling the shaped glass article.

Abstract: Mold assemblies for forming shaped glass articles are disclosed herein. According to one embodiment, a mold assembly may include a mold body including a mold cavity, a support base, and a plenum body extending between the mold body and the support base. When the mold assembly is heated to an average temperature of greater than or equal to about 650° C. by an overhead heating source, the temperature at the center of the mold cavity may be less than at the perimeter of the mold cavity. The difference between the temperature at the center of the mold cavity and the temperature at the perimeter of the mold cavity may be at least about 12° C.

Abstract: Mold assemblies for forming shaped glass articles are disclosed herein. According to one embodiment, a mold assembly may include a mold body including a mold cavity, a support base, and a plenum body extending between the mold body and the support base. When the mold assembly is heated to an average temperature of greater than or equal to about 650° C. by an overhead heating source, the temperature at the center of the mold cavity may be less than at the perimeter of the mold cavity. The difference between the temperature at the center of the mold cavity and the temperature at the perimeter of the mold cavity may be at least about 12° C.

Abstract: A method of making a shaped glass article includes placing a glass sheet on top of a mold. A heat exchanger is arranged relative to the mold such that a heat exchange surface of the heat exchanger is in opposing relation to a back surface of the mold and separated from the back surface of the mold by a gap containing a layer of gas. The height of the gap is selected such that the dominant heat transfer between the heat exchange surface and the back surface of the mold is by conduction through the layer of gas. The glass sheet is heated and formed into a shaped glass article with the mold. The heat exchanger is operated to remove heat from at least part of the mold during at least one of heating the glass sheet, forming the shaped glass article, and cooling the shaped glass article.