Patents by Inventor Byung-Koog Ra

Byung-Koog Ra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same
    Patent number: 8591809
    Abstract: A substrate transfer container comprises a housing including a plurality of substrate slots positioned within a gas chamber having an interior environment. Each substrate slot accommodates a substrate undergoing a substrate manufacturing process, the interior environment of the gas chamber being selectively sealed from an exterior environment. A detection unit at the housing is constructed and arranged to detect an environmental property of the interior environment of the gas chamber, and to generate a detection signal in response. A signal transmission module at the housing is configured to wirelessly transmit a detection signal received from the detection unit.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: November 26, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byung-Koog Ra, Tae-Sik Yun, Kunhyung Lee, Hyunjoon Kim, Hyeogki Kim, KiDoo Kim
  • SUBSTRATE TRANSFER CONTAINER, GAS PURGE MONITORING TOOL, AND SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH THE SAME
    Publication number: 20110220545
    Abstract: A substrate transfer container comprises a housing including a plurality of substrate slots positioned within a gas chamber having an interior environment. Each substrate slot accommodates a substrate undergoing a substrate manufacturing process, the interior environment of the gas chamber being selectively sealed from an exterior environment. A detection unit at the housing is constructed and arranged to detect an environmental property of the interior environment of the gas chamber, and to generate a detection signal in response. A signal transmission module at the housing is configured to wirelessly transmit a detection signal received from the detection unit.
    Type: Application
    Filed: March 15, 2011
    Publication date: September 15, 2011
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Byung-Koog Ra, Tae-Sik Yun, Kunhyung Lee, Hyunjoon Kim, Hyeogki Kim, KiDoo Kim