Patents by Inventor Cari F. Herrmann

Cari F. Herrmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • AlOatomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices
    Patent number: 7553686
    Abstract: Micro-mechanical devices, such as MEMS, having layers thereon, and methods of forming the layers, are disclosed. In one aspect, a method may include forming a layer including an oxide of aluminum over at least a portion of a micro-mechanical device, and coating the layer by bonding material to surface hydroxyl groups of the layer. In another aspect, a method may include introducing a micro-mechanical device into an atomic layer deposition chamber, and substantially filling nanometer sized voids of the micro-mechanical device by using atomic layer deposition to introduce material into the voids. In a still further aspect, a method may include introducing an alkylaminosilane to a micro-mechanical device having a surface hydroxyl group, and bonding a silane to the micro-mechanical device by reacting the alkylaminosilane with the surface hydroxyl group.
    Type: Grant
    Filed: August 2, 2004
    Date of Patent: June 30, 2009
    Assignee: The Regents of the University of Colorado, a Body Corporate
    Inventors: Steven M. George, Cari F. Herrmann